WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2004095086) CONFORMAL COATINGS FOR MICRO-OPTICAL ELEMENTS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/095086    International Application No.:    PCT/US2004/008762
Publication Date: 04.11.2004 International Filing Date: 22.03.2004
IPC:
C23C 16/44 (2006.01), G02B 1/10 (2006.01)
Applicants: PLANAR SYSTEMS, INC. [US/US]; 1195 NW Compton Drive, Beaverton, OR 97006 (US) (For All Designated States Except US).
MAULA, Jarmo, Ilmari [FI/FI]; (FI) (For US Only).
TÖRNQVIST, Runar, Olof, Ivar [FI/FI]; (FI) (For US Only)
Inventors: MAULA, Jarmo, Ilmari; (FI).
TÖRNQVIST, Runar, Olof, Ivar; (FI)
Agent: FERRIS, Kassim, M.; Stoel Rives LLP, 900 SW Fifth Avenue, Suite 2600, Portland, OR 97204-1268 (US)
Priority Data:
10/404,928 31.03.2003 US
Title (EN) CONFORMAL COATINGS FOR MICRO-OPTICAL ELEMENTS
(FR) REVETEMENTS CONFORMES POUR ELEMENTS MICRO-OPTIQUES
Abstract: front page image
(EN)A micro-optical element is produced through vapor deposition techniques, such as atomic layer deposition. An optical structure (90) having a surface with uneven structures is exposed one or more precursor vapors to create a self-limiting film growth on the surface of the optical structure. The film thickness may be increased and controlled by subsequent exposures. The resulting film (92) conforms to surface structures having varying complex dimensions.
(FR)L'invention concerne un élément micro-optique produit au moyen de techniques de dépôt par évaporation sous vide, notamment le dépôt en couches atomiques. Une structure optique (90) possédant une surface pourvue de structures irrégulières est exposée à une ou plusieurs vapeurs de précurseurs afin d'entraîner une croissance de film autolimitative sur la surface de la structure optique. L'épaisseur du film peut être augmentée et régulée par des expositions ultérieures. Le film obtenu (92) épouse les structures de la surface possédant des dimensions complexes et variables.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)