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Machine translation
1. (WO2004035854) METHOD AND APPARATUS FOR PROCESSING SUBSTRATES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/035854    International Application No.:    PCT/CH2003/000673
Publication Date: 29.04.2004 International Filing Date: 15.10.2003
IPC:
C23C 14/54 (2006.01), C23C 16/52 (2006.01)
Applicants: UNAXIS BALZERS AG [LI/LI]; FL-9496 Balzers (LI) (For All Designated States Except US).
ZÜGER, Othmar [CH/LI]; (LI) (For US Only)
Inventors: ZÜGER, Othmar; (LI)
Common
Representative:
UNAXIS BALZERS AG; Patentabteilung SRLP, FL-9496 Balzers (LI)
Priority Data:
60/418,672 15.10.2002 US
Title (EN) METHOD AND APPARATUS FOR PROCESSING SUBSTRATES
(FR) PROCÉDÉ ET APPAREIL DE TRAITEMENT DE SUBSTRAT
Abstract: front page image
(EN)Method and apparatus for processing substrates are described. An apparatus for processing a substrate according to the present invention includes a source for processing the substrate. A sensor generates a sensor signal that is related to a state of the substrate. A source controller is coupled to the sensor and is coupled to the source. The source controller generates a control signal that is related to the sensor signal and that modifies at least one operating parameter of the plasma source during the processing of the substrate.
(FR)L'invention concerne un procédé et un appareil de traitement de substrat. Ledit appareil comprend une source de traitement de substrat. Un capteur génère un signal associé à un état du substrat. Un contrôleur de source est couplé au capteur et à la source. Il génère un signal de commande qui est associé au signal de capteur et qui modifie au moins un paramètre de la source de plasma pendant le traitement dudit substrat.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, OM, PH, PL, PT, RO, RU, SD, SE, SG, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)