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Pub. No.:    WO/2004/034451    International Application No.:    PCT/JP2002/010607
Publication Date: 22.04.2004 International Filing Date: 11.10.2002
C11D 3/34 (2006.01), C11D 11/00 (2006.01), H01L 21/321 (2006.01)
Applicants: WAKO PURE CHEMICAL INDUSTRIES, LTD. [JP/JP]; 1-2, Doshomachi 3-chome, Chuo-ku, Osaka-shi, Osaka 540-8605 (JP) (For All Designated States Except US).
KAKIZAWA, Masahiko [JP/JP]; (JP) (For US Only).
KIMURA, Mayumi [JP/JP]; (JP) (For US Only).
HAYASHIDA, Ichiro [JP/JP]; (JP) (For US Only)
Inventors: KAKIZAWA, Masahiko; (JP).
KIMURA, Mayumi; (JP).
Priority Data:
(JA) 基板洗浄剤
Abstract: front page image
(EN)A metal corrosion inhibitor; a detergent for substrate surfaces, especially ones having a copper wiring formed thereon, which contains the inhibitor; and a cleaning method. The metal corrosion inhibitor contains either an amino acid having a thiol group in the molecule or a derivative thereof. The treating agent and detergent for substrate surfaces contain the metal corrosion inhibitor. The method of treating and cleaning substrate surfaces employs the metal corrosion inhibitor.
(FR)L'invention concerne un inhibiteur de corrosion métallique, un détergent de surfaces de substrat, spécialement un de ceux comportant un enroulement en cuivre formé dessus contenant l'inhibiteur, et un procédé de nettoyage. L'inhibiteur de corrosion métallique contient soit un acide aminé à groupe thiol dans la molécule soit, un dérivé de ce composé. L'agent de traitement et le détergent de surfaces de substrat contiennent l'inhibiteur de corrosion métallique. Le procédé de traitement et de nettoyage de surfaces de substrat utilisent l'inhibiteur de corrosion métallique.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, OM, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)