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1. (WO2004034126) MICRO MOVING ELEMENT COMPRISING TORSION BAR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/034126    International Application No.:    PCT/JP2002/010560
Publication Date: 22.04.2004 International Filing Date: 10.10.2002
IPC:
G02B 26/08 (2006.01)
Applicants: FUJITSU LIMITED [JP/JP]; 1-1, Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-shi, Kanagawa 211-8588 (JP) (For All Designated States Except US).
FUJITSU MEDIA DEVICES LIMITED [JP/JP]; 3-12, Shin-Yokohama 2-chome, Kohoku-ku, Yokohama-shi, Kanagawa 222-0033 (JP) (For All Designated States Except US).
TSUBOI, Osamu [JP/JP]; (JP) (For US Only).
MIZUNO, Yoshihiro [JP/JP]; (JP) (For US Only).
UEDA, Satoshi [JP/JP]; (JP) (For US Only).
SAWAKI, Ippei [JP/JP]; (JP) (For US Only).
YAMAGISHI, Fumio [JP/JP]; (JP) (For US Only).
SONEDA, Hiromitsu [JP/JP]; (JP) (For US Only).
KOUMA, Norinao [JP/JP]; (JP) (For US Only)
Inventors: TSUBOI, Osamu; (JP).
MIZUNO, Yoshihiro; (JP).
UEDA, Satoshi; (JP).
SAWAKI, Ippei; (JP).
YAMAGISHI, Fumio; (JP).
SONEDA, Hiromitsu; (JP).
KOUMA, Norinao; (JP)
Agent: YOSHIDA, Minoru; 2-32-1301, Tamatsukuri-motomachi, Tennoji-ku, Osaka-shi, Osaka 543-0014 (JP)
Priority Data:
Title (EN) MICRO MOVING ELEMENT COMPRISING TORSION BAR
(FR) ELEMENT MOBILE A L'ECHELLE DU MICRON COMPRENANT UNE BARRE DE TORSION
(JA) トーションバーを備えるマイクロ可動素子
Abstract: front page image
(EN)A micro moving element (X1) comprises a moving section (111), frame (112), which are integrally molded in a material substrate having a laminate structure comprising conductor layers (110a−110c) including a core conductor layer (110b) and insulation layers (110d, 110e) interposed between the conductor layers (110a−110c), and a coupling section (113) that couples them. The moving section (111) includes a first structure derived from the core conductor layer (110b). The frame (112) includes a second structure derived from the core conductor layer (110b). The coupling section (113) includes torsion bars (113a, 113b) derived from the core conductor layer (110b), continuously connected to the first and second structures, and electrically separated from each other.
(FR)L'invention concerne un élément mobile (X1) à l'échelle du micron, qui comprend : une partie mobile (111) et un cadre (112) moulés d'une seule pièce dans un substrat présentant une structure stratifiée, cette structure comportant des couches conductrices (110a- 110c), y compris une couche conductrice (110c) centrale et des couches d'isolation (110d, 110e) placées entre les couches conductrices (110a-110c) ; et une partie couplage (113) couplant celles-ci. La partie mobile (111) comprend une première structure dérivée de la couche conductrice (110b) centrale. Le cadre (112) comprend une seconde structure dérivée de la couche conductrice (110b) centrale. La partie couplage (113) comprend des barres de torsion (113a, 113b) dérivées de la couche conductrice (110b) centrale, qui sont reliées de manière continue aux première et seconde structures et électriquement séparées l'une de l'autre.
(JA)マイクロ可動素子(X1)は、コア導体層(110b)を含む複数の導体層(110a~110c)および導体層(110a~110c)間に介在する絶縁層(110d,110e)よりなる積層構造を有する材料基板において一体的に成形されている、可動部(111)と、フレーム(112)と、これらを連結する連結部(113)とを備える。可動部(111)は、コア導体層(110b)に由来する第1構造体を含む。フレーム(112)は、コア導体層(110b)に由来する第2構造体を含む。連結部(113)は、コア導体層(110b)に由来して第1構造体および第2構造体に対して連続的に接続し且つ相互に電気的に分離されている複数のトーションバー(113a,113b)を含む。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, OM, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)