WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2004034007) FIBRE OPTIC BASED SEMICONDUCTOR MICRO SENSORS FOR SENSING PRESSURE OR TEMPERATURE, FABRICATION METHODS OF SAID SENSORS, AND A METHOD OF SECURING AN OPTICAL FIBRE TO A SILICON BLOCK
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/034007    International Application No.:    PCT/GB2003/004362
Publication Date: 22.04.2004 International Filing Date: 08.10.2003
IPC:
B81B 3/00 (2006.01), G01L 9/00 (2006.01)
Applicants: COUNCIL FOR THE CENTRAL LABORATORY OF THE RESEARCH COUNCILS [GB/GB]; Rutherford Appleton Laboratory, Chilton, Didcot, Oxfordshire OX11 0QX (GB) (For All Designated States Except US).
STEVENS, Robert [GB/GB]; (GB) (For US Only).
HARPIN, Arnold [GB/GB]; (GB) (For US Only)
Inventors: STEVENS, Robert; (GB).
HARPIN, Arnold; (GB)
Agent: PALMER, Jonathan; Boult Wade Tennant, Verulam Gardens, 70 Gray's Inn Road, London WC1X 8BT (GB)
Priority Data:
0223361.7 08.10.2002 GB
Title (EN) FIBRE OPTIC BASED SEMICONDUCTOR MICRO SENSORS FOR SENSING PRESSURE OR TEMPERATURE, FABRICATION METHODS OF SAID SENSORS, AND A METHOD OF SECURING AN OPTICAL FIBRE TO A SILICON BLOCK
(FR) MICRO-CAPTEUR OPTIQUE
Abstract: front page image
(EN)An optical micro sensor (1) for measuring one or more environmental parameters, such as pressure and temperature, through the modification of incident radiation. The sensor (1) is fabricated using MEMS technology and is adapted to receive an optical fibre (40) which communicates radiation to and from the micro sensor (1). The sensor (1) has an environmentally-sensitive element (4) which modifies the incident radiation communicated by the optical fibre (40). The modified radiation is communicated back along the optical fibre (40) and provides information regarding the environmental conditions surrounding the sensor (1). The pressure sensor is provided with a Fabry Perot cavity (3) in a first surface of a silicon wafer (2). The cavity is covered by a reflector at the environmentally-sensitive element (4). The diameter of the channel (7) holding the optical fibre (40) is greater than the diameter of the cavity (3). The temperature sensor is provided with luminescent material at the element (4). Also, a method of securing an optical fibre to a silicon block is claimed.
(FR)L'invention concerne un micro-capteur (1) optique destiné à mesurer un ou plusieurs paramètres environnementaux, tels que la pression ou la température, par modification de rayonnement incident. Ledit capteur (1) est fabriqué au moyen de la technologie MEMS et il est conçu pour recevoir une fibre optique (40) qui transmet le rayonnement vers ledit micro-capteur (1) et à partir de celui-ci. Ledit capteur (1) présente un élément (4) sensible à l'environnement qui modifie le rayonnement incident transmis par la fibre optique (40). Ledit rayonnement modifié est retransmis le long de la fibre optique (40) et fournit des informations concernant les conditions environnementales entourant le capteur (1).
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)