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1. (WO2004032212) STAGE DEVICE AND EXPOSURE DEVICE

Pub. No.:    WO/2004/032212    International Application No.:    PCT/JP2003/012136
Publication Date: Apr 15, 2004 International Filing Date: Sep 24, 2003
IPC: G03F 7/20
Applicants: NIKON CORPORATION

TANAKA, Keiichi

Inventors: TANAKA, Keiichi

Title: STAGE DEVICE AND EXPOSURE DEVICE
Abstract:
Two fixed guides (6) extending in the Y-direction of a stage device (1) are each provided with a Y-slider (7) driven by a linear motor (16). Two movable guides (21, 22) extending in the X-direction are laid across the two Y-sliders (7), the movable guide (21) being provided with an X-slider (25) driven by an air cylinder (28). The X-slider (25) has a stage (61) projecting therefrom, and a table (65) driven in the θz-direction (around the Z-axis) is mounted on the stage (61). The stage device (201) is arranged such that in the Y-direction, a continuous movement (scan) requiring accurate positioning is effected by linear motors (214, 24) and in the X-direction, an intermittent movement and stoppage are effected by an air cylinder.