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1. (WO2004029692) MICRO MIRROR STRUCTURE WITH FLAT REFLECTIVE COATING

Pub. No.:    WO/2004/029692    International Application No.:    PCT/US2003/029076
Publication Date: Apr 8, 2004 International Filing Date: Sep 16, 2003
IPC: B41J 2/465
B81B 1/00
G02B 26/08
Applicants: ROSEMOUNT AEROSPACE INC.
Inventors: GUO, Shuwen
HOFFMAN, Ross
Title: MICRO MIRROR STRUCTURE WITH FLAT REFLECTIVE COATING
Abstract:
A micro mirror structure including a plurality of individually movable mirrors. Each mirror has a generally concave shape from a top perspective at a temperature of about 20 degrees Celsius and has a generally convex shape from a top perspective at a temperature of about 85 degrees Celsius. In one embodiment, the radius of curvature may be greater than about 500 mm at a temperature of about 20 degrees Celsius and may be less than about -600 mm at a temperature of about 85 degrees Celsius at a thickness of about 10 microns. In another embodiment, the invention is a micro mirror structure including a plurality of individually movable mirrors arranged in an array. Each mirror includes a substrate, a diffusion barrier layer located above the substrate, and a reflective layer located above the diffusion barrier layer. The diffusion barrier layer generally limits the diffusion of the top reflective layer through the diffusion barrier layer.