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1. (WO2004027861) SEMI-CONDUCTOR COMPONENT WITH CONDENSATORS BURIED IN THE SUBSTRATE AND INSULATED COMPONENT LAYER THEREOF

Pub. No.:    WO/2004/027861    International Application No.:    PCT/DE2003/003044
Publication Date: Apr 1, 2004 International Filing Date: Sep 13, 2003
IPC: H01L 21/02
H01L 21/8242
H01L 27/108
H01L 27/12
Applicants: INFINEON TECHNOLOGIES AG
HOFMANN, Franz
LEHMANN, Volker
RISCH, Lothar
RÖSNER, Wolfgang
SPECHT, Michael
Inventors: HOFMANN, Franz
LEHMANN, Volker
RISCH, Lothar
RÖSNER, Wolfgang
SPECHT, Michael
Title: SEMI-CONDUCTOR COMPONENT WITH CONDENSATORS BURIED IN THE SUBSTRATE AND INSULATED COMPONENT LAYER THEREOF
Abstract:
The invention relates to a semi-conductor substrate and a semi-conductor circuit embodied therein and a production method associated therewith. A plurality of cavities (P) provided with a respective dielectric layer (D) and a capacitor-electrode (E2) are embodied in order to produce capacitors buried in a carrier substrate and an actual semi-conductor component layer (3) is insulated from the carrier substrate (1) by an insulation layer (2).