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1. WO2004019048 - MICROMECHANICAL COMPONENT

Publication Number WO/2004/019048
Publication Date 04.03.2004
International Application No. PCT/DE2003/000591
International Filing Date 25.02.2003
IPC
B81B 7/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
7Microstructural systems
G01P 15/08 2006.01
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
CPC
B81B 2201/0235
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
02Sensors
0228Inertial sensors
0235Accelerometers
B81B 7/0012
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
7Microstructural systems; ; Auxiliary parts of microstructural devices or systems
0009Structural features, others than packages, for protecting a device against environmental influences
0012Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
G01P 15/08
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
Applicants
  • ROBERT BOSCH GMBH [DE]/[DE] (AllExceptUS)
  • ULLMANN, Dirk [DE]/[DE] (UsOnly)
Inventors
  • ULLMANN, Dirk
Priority Data
102 35 370.002.08.2002DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) MIKROMECHANISCHES BAUELEMENT
(EN) MICROMECHANICAL COMPONENT
(FR) COMPOSANT MICROMECANIQUE
Abstract
(DE)
Die Erfindung betrifft ein mikromechanisches Bauelement,insbesondere Beschleunigungsensor, mit einem Substrat, mindestens einer seismischen Masse, wobei die Federeinrichtung mit einem ersten Ende mit dem Substrat und an einem zweiten Ende mit der Masse verbunden ist, und wobei die Steifigkeit (Federkostante) der Federeinrichtung so ausgelegt ist, dass durch eine Beschleunigung relativ zum substrat, insbesondere parallel zu einer Oberfläche des Substrats, eine Bewegung der Masse relative zum Substrat verursachbar ist.
(EN)
The invention relates to a micromechanical component, especially an acceleration sensor, comprising a substrate, at least one seismic mass, whereby the first end of the spring device is connected to the substate and the second end is connected to the mass. The stiffness (spring constant) of the spring device is such that a movement of the mass relative to the substrate can occur as a result of an acceleration relative to the substrate, especially parallel to a surface of said substrate.
(FR)
La présente invention concerne un composant micromécanique, notamment un capteur d'accélération, comprenant un substrat et au moins une masse sismique. Selon l'invention, un système de ressort est relié à une première extrémité au substrat et à une seconde extrémité à la masse, et la raideur (constante de rappel) du système de ressort est telle qu'une accélération par rapport au substrat, notamment parallèlement à une face du substrat, provoque un déplacement de la masse par rapport au substrat.
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