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1. WO2004018879 - VACUUM PUMP AND METHOD OF STARTING THE SAME

Publication Number WO/2004/018879
Publication Date 04.03.2004
International Application No. PCT/JP2003/010207
International Filing Date 11.08.2003
Chapter 2 Demand Filed 15.01.2004
IPC
F04C 13/00 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
13Adaptations of machines or pumps for special use, e.g. for extremely high pressures
F04C 18/16 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
18Rotary-piston pumps specially adapted for elastic fluids
08of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
12of other than internal-axis type
14with toothed rotary pistons
16with helical teeth, e.g. chevron-shaped, screw type
F04D 19/04 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps specially adapted for elastic fluids
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 27/02 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
27Control, e.g. regulation, of pumps, pumping nstallations or pumping systems specially adapted for elastic fluids
02Surge control
CPC
F04C 13/005
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
13Adaptations of machines or pumps for special use, e.g. for extremely high pressures
005Removing contaminants, deposits or scale from the pump; Cleaning
F04C 18/126
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
18Rotary-piston pumps specially adapted for elastic fluids
08of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
12of other than internal-axis type
126with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
F04C 18/16
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
18Rotary-piston pumps specially adapted for elastic fluids
08of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
12of other than internal-axis type
14with toothed rotary pistons
16with helical teeth, e.g. chevron-shaped, screw type
F04C 2220/12
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
2220Application
10Vacuum
12Dry running
F04C 2270/03
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
2270Control; Monitoring or safety arrangements
03Torque
F04C 2270/17
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
2270Control; Monitoring or safety arrangements
17Tolerance; Play; Gap
Applicants
  • EBARA CORPORATION [JP]/[JP] (AllExceptUS)
  • IIJIMA, Naoki [JP]/[JP] (UsOnly)
  • WATANABE, Jiro [JP]/[JP] (UsOnly)
  • CHINO, Hiroyuki [JP]/[JP] (UsOnly)
  • YANAGISAWA, Kiyoshi [JP]/[JP] (UsOnly)
  • KAWAMURA, Takeshi [JP]/[JP] (UsOnly)
Inventors
  • IIJIMA, Naoki
  • WATANABE, Jiro
  • CHINO, Hiroyuki
  • YANAGISAWA, Kiyoshi
  • KAWAMURA, Takeshi
Agents
  • WATANABE, Isamu
Priority Data
2002-23972820.08.2002JP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) VACUUM PUMP AND METHOD OF STARTING THE SAME
(FR) POMPE A VIDE ET PROCEDE DE DEMARRAGE DE CETTE POMPE
Abstract
(EN)
The present invention relates to a vacuum pump and a method of starting a vacuum pump. The vacuum pump includes a pump rotor (1) rotatably disposed in a casing (2), and a pump-rotor controller (15) for controlling rotation of the pump rotor (1) in a forward direction or a reverse direction in accordance with a predetermined pattern at the time of starting the vacuum pump.
(FR)
L'invention concerne une pompe à vide et un procédé de démarrage d'une pompe à vide. La pompe à vide comprend un rotor de pompe (1) disposé rotatif dans un boîtier (2), et une unité de commande de rotor de pompe (15) permettant de commander la rotation du rotor (1) dans une direction avant ou dans une direction inverse selon une structure déterminée au moment du démarrage de la pompe à vide.
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