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1. (WO2004010462) INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/010462    International Application No.:    PCT/US2003/013937
Publication Date: 29.01.2004 International Filing Date: 05.05.2003
Chapter 2 Demand Filed:    04.12.2003    
IPC:
G01N 21/35 (2006.01), H01L 21/00 (2006.01)
Applicants: ADVANCED TECHNOLOGY MATERIALS, INC. [US/US]; 7 Commerce Drive, Danbury, CT 06810 (US)
Inventors: ARNO, Jose; (US)
Agent: MARGARET CHAPPUIS; Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810 (US)
Priority Data:
10/140,848 08.05.2002 US
Title (EN) INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL
(FR) SYSTEME CAPTEUR INFRAROUGE A THERMOPILES POUR LE CONTROLE ET LA REGULATION DE PROCESSUS FAISANT INTERVENIR DES SEMI-CONDUCTEURS
Abstract: front page image
(EN)A thermopile-based detector (20) for monitoring and/or controlling semiconductor processes, and a method of monitoring and/or controlling semiconductor processes using thermopile-based sensing of conditions in and/or affecting such processes.
(FR)L'invention concerne un capteur à base de thermopiles pour le contrôle et la régulation de processus faisant intervenir des semi-conducteurs, par détection, au moyen de thermopiles, de conditions régnant dans de tels processus et/ou affectant ces derniers.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NI, NO, NZ, OM, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)