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Machine translation
1. (WO2004009868) VAPORIZER FOR THIN FILM DEPOSITION APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/009868    International Application No.:    PCT/KR2003/001392
Publication Date: 29.01.2004 International Filing Date: 14.07.2003
Chapter 2 Demand Filed:    21.10.2003    
IPC:
C23C 16/448 (2006.01)
Applicants: IPS LTD. [KR/KR]; 33, Jije-dong, Pyungtaek-city, 450-090 Kyungki-do (KR) (For All Designated States Except US).
CHO, Byung-Chul [KR/KR]; (KR) (For US Only).
YOO, Keun-Jae [KR/KR]; (KR) (For US Only).
LEE, Sang-Kyu [KR/KR]; (KR) (For US Only).
KYUNG, Hyun-Soo [KR/KR]; (KR) (For US Only)
Inventors: CHO, Byung-Chul; (KR).
YOO, Keun-Jae; (KR).
LEE, Sang-Kyu; (KR).
KYUNG, Hyun-Soo; (KR)
Agent: LEE, Young-Pil; The Cheonghwa Building, 1571-18, Seocho-dong, Seocho-gu, Seoul 137-874 (KR)
Priority Data:
10-2002-0041980 18.07.2002 KR
Title (EN) VAPORIZER FOR THIN FILM DEPOSITION APPARATUS
(FR) VAPORISATEUR POUR APPAREIL DE DEPOT DE COUCHES MINCES
Abstract: front page image
(EN)A vaporizer for a thin film deposition apparatus. The vaporizer includes a primary body, which has an innerspace and comprises a transfer gas inlet pipe through which a transfer gas is supplied, a mixed gas outletpipe through which a mixed gas is exhausted, and a first heater which is installed in the primary body to heatthe inner space; and one or more jet units, which are installed on sides of the primary body to jet precursorsinto the primary body.
(FR)L'invention concerne un vaporisateur pour appareil de dépôt de couches minces. Le vaporisateur comprend un corps primaire, comprenant un espace interne et un tuyau d'entrée de gaz de transfert par lequel est injecté un gaz de transfert, un tuyau de sortie de gaz mixte par lequel est évacué un gaz mixte, et un premier élément chauffant installé dans le corps primaire pour chauffer l'expace interne; et une ou plusieurs unités d'injection, installées sur les côtés du corps primaire pour injecter des précurseurs dans le corps primaire.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)