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1. (WO2004009867) ZIRCONIUM COMPLEX USED FOR THE CVD METHOD AND PREPARATION METHOD OF A THIN FILM USING THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/009867    International Application No.:    PCT/IT2003/000445
Publication Date: 29.01.2004 International Filing Date: 18.07.2003
Chapter 2 Demand Filed:    20.02.2004    
IPC:
C23C 16/40 (2006.01)
Applicants: SAES GETTERS S.p.A. [IT/IT]; Viale Italia, 77, I-20020 Lainate MI (IT) (For All Designated States Except US).
TOSHIMA MFG. CO. LTD. [JP/JP]; 1414 Shimonomoto, Higashimatsuyama-Shi, Saitama 355-0036 (JP) (For All Designated States Except US).
KOJI, Yoda [JP/JP]; (JP) (For US Only).
YUZO, Tasaki [JP/JP]; (JP) (For US Only)
Inventors: KOJI, Yoda; (JP).
YUZO, Tasaki; (JP)
Agent: PIZZOLI, Antonio; Società Italiana Brevetti S.p.A., Via Carducci, 8, I-20123 Milano (IT)
Priority Data:
2002-244354 22.07.2002 JP
Title (EN) ZIRCONIUM COMPLEX USED FOR THE CVD METHOD AND PREPARATION METHOD OF A THIN FILM USING THEREOF
(FR) COMPLEXE DE ZIRCONIUM UTILISE DANS LE PROCEDE CVD ET PROCEDE DE PREPARATION D'UN FILM MINCE CONTENANT CELUI-CI
Abstract: front page image
(EN)In the preparation of a PZT thin film by the liquid source CVD method, using zirconium tetrakis(isobutyrylpivaloylmethanate) as a zirconium precursor enables to obtain a constant composition ratio of films within a wide range of the substrate temperature, and negates the need for the thermal treatment alter the film preparation. Accordingly, the present invention provides a PZT thin film having a constant quality at a low cost.
(FR)L'invention concerne la préparation d'un film mince PZT par un procédé CVD à source liquide, consistant à utiliser du tétrakis(isobutyrylpivaloylméthanate) de zirconium comme précuseur du zirconium afin d'obtenir un rapport de composition constant des films dans une large gamme de températures du substrat, ne rendant plus nécessaire le traitement thermique après la préparation du film. La présente invention permet ainsi d'obtenir un film mince PZT de qualité constante à un coût réduit.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)