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Machine translation
1. (WO2004005574) ROTARY TARGET AND METHOD FOR ONSITE MECHANICAL ASSEMBLY OF ROTARY TARGET
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/005574    International Application No.:    PCT/US2003/021211
Publication Date: 15.01.2004 International Filing Date: 02.07.2003
IPC:
B65G 3/00 (2006.01), B65G 29/00 (2006.01), C23C 14/34 (2006.01), H01J 37/34 (2006.01)
Applicants: ACADEMY PRECISION MATERIALS a division of ACADEMY CORPORATION [US/US]; 5520 Midway Park Place NE, Albuquerque, NM 87109 (US) (For All Designated States Except US).
WITYAK, George [US/US]; (US) (For US Only).
WEBB, Bruce, W. [US/US]; (US) (For US Only)
Inventors: WITYAK, George; (US).
WEBB, Bruce, W.; (US)
Agent: PEACOCK, Deborah, A.; Peacock, Myers & Adams, P.C., P.O. Box 26927, Albuquerque, NM 87125-6927 (US)
Priority Data:
60/393,547 02.07.2002 US
Title (EN) ROTARY TARGET AND METHOD FOR ONSITE MECHANICAL ASSEMBLY OF ROTARY TARGET
(FR) CIBLE ROTATIVE
Abstract: front page image
(EN)A rotary target (10) for use in a physical deposition process is disclosed. The rotary target comprises at least one rotary target segment (28) mechanically disposed on a backing tube (30). The target is secured with inner (40) and outer (42) rings.
(FR)La présente invention concerne une cible rotative utilisée dans un processus de dépôt physique. Cette cible rotative comprend au moins un segment de cible rotative déposé mécaniquement sur un tuyau support.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, OM, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)