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Pub. No.:    WO/2004/004012    International Application No.:    PCT/JP2003/007648
Publication Date: 08.01.2004 International Filing Date: 17.06.2003
H01L 21/322 (2006.01)
Applicants: NIKON CORPORATION [JP/JP]; 2-3, Marunouchi 3-Chome, Chiyoda-ku, Tokyo 100-8331 (JP) (For All Designated States Except US).
ISHIDA, Tomohisa [JP/JP]; (JP) (For US Only).
KAMASHITA, Atsushi [JP/JP]; (JP) (For US Only).
SUZUKI, Satoshi [JP/JP]; (JP) (For US Only)
Inventors: ISHIDA, Tomohisa; (JP).
KAMASHITA, Atsushi; (JP).
SUZUKI, Satoshi; (JP)
Agent: FURUYA, Fumio; Dai2 Meiho Bldg. 9th Floor, 19-5, Nishishinjuku 1-Chome, Shinjuku-ku, Tokyo 160-0023 (JP)
Priority Data:
2002-186590 26.06.2002 JP
(JA) 固体撮像装置
Abstract: front page image
(EN)A solid imaging device comprising a plurality of unit pixels that generate signal charges in response to incident light, characterized in that a gettering area is provided in a unit pixel area. This gettering area, being close in distance to unit pixels, delivers a direct and efficient gettering power to the pixel area of the solid imaging device, whereby it is possible to efficiently remove metal contaminants contained in the pixel area and significantly reduce dark output generated from metal contaminants.
(FR)L'invention concerne un dispositif d'imagerie solide comprenant une pluralité de pixels unitaires générant des charges de signaux en réponse à un rayonnement incident. Le dispositif est caractérisé en ce qu'une zone de getter est placée dans une zone de pixels unitaires. Cette zone de getter, située à proximité des pixels unitaires, fournit une puissance de getter directe et efficace à la zone de pixels du dispositif d'imagerie solide, rendant ainsi possible l'élimination efficace de contaminants métalliques renfermés dans la zone de pixels et la réduction importante de sortie sombre générée par les contaminants métalliques.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)