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1. WO2004003822 - CONTROLLING A MATERIAL PROCESSING TOOL AND PERFORMANCE DATA

International Application Status
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17.01.2021International Application Status ReportHTML, PDF, XMLPDF, XML
Published International Application
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08.01.2004Initial Publication with ISR( (A1 02/2004))PDF (52p.)PDF (52p.), ZIP(XML + TIFFs)
Search and Examination-Related Documents
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28.12.2004International Preliminary Examination ReportPDF (3p.)PDF (3p.), ZIP(XML + TIFFs)
Related Documents on file at the International Bureau
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08.01.2004Priority DocumentPDF (54p.)PDF (54p.), ZIP(XML + TIFFs)