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1. WO2004003822 - CONTROLLING A MATERIAL PROCESSING TOOL AND PERFORMANCE DATA

Publication Number WO/2004/003822
Publication Date 08.01.2004
International Application No. PCT/US2003/016239
International Filing Date 27.06.2003
Chapter 2 Demand Filed 22.10.2003
IPC
G05B 19/418 2006.01
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)
CPC
G05B 19/41865
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
41865characterised by job scheduling, process planning, material flow
G05B 2219/31443
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
31From computer integrated manufacturing till monitoring
31443Keep track of nc program, recipe program
G05B 2219/32366
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
32Operator till task planning
32366Line performance evaluation
G05B 2219/45031
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
45Nc applications
45031Manufacturing semiconductor wafers
Y02P 90/02
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
90Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Applicants
  • TOKYO ELECTRON LIMITED [JP]/[JP] (AllExceptUS)
  • LAM, Hieu, A. [US]/[US] (UsOnly)
  • YUE, Hongyu [US]/[US] (UsOnly)
Inventors
  • LAM, Hieu, A.
  • YUE, Hongyu
Agents
  • CASEY, Michael, R.
Priority Data
60/391,96628.06.2002US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) CONTROLLING A MATERIAL PROCESSING TOOL AND PERFORMANCE DATA
(FR) COMMANDE D'OUTIL DE TRAITEMENT DE MATERIAU ET DONNEES DE PERFORMANCE
Abstract
(EN)
According to an embodiment of the present invention, a material processing systeme (1) including a process tool (10) and a process performance control system (100). The process performance control system (100) includes a process performance controller (55) coupled to the process tool (10), where the process performance controller (55) includes a process performance prediction model (110), a process recipe correction filter (120), a process controller (130), and process performance model correction algorithm (150). The process performance prediction model (110) is configured to receive tool data from a plurality of sensors coupled to process tool (10) and to predict process performance data. The process recipe correction filter (120) is coupled to the process performance prediction model (110) and configured to receive predicted process performance data and generate a process recipe correction for run-to-run process control. The process controller (130) is coupled to the process recipe correction filter (120) and is configured to update a process recipe according to the process recipe correction.
(FR)
Dans un mode de réalisation, l'invention concerne un système de traitement de matériau (1) comprenant un outil de processus (10) et un système de commande de performance de processus (100). Le système de commande de performance de processus (100) comprend une unité de commande (55) couplée à l'outil de processus (10), cette unité de commande (55) comprenant un modèle de prédiction de performance de processus (110), un filtre de correction de recette de processus (120), une unité de commande de processus (130), et un algorithme de correction de modèle de performance de processus (150). Le modèle de prédiction de performance de processus (110) est conçu afin de recevoir des données d'outil à partir de plusieurs capteurs couplés à l'outil de processus (10) et de prédire les données de performance de processus. Le filtre de correction de recette de processus (120) est couplé au modèle de prédiction de performance de processus (110) et conçu afin de recevoir des données prédites de performance de processus et de produire une correction de recette de processus aux fins de commande de processus séquentiel. L'unité de commande de processus (130) est couplée au filtre de correction de recette de processus (120) et conçue afin de mettre à jour une recette de processus selon la correction de recette.
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