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1. WO2004001582 - AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS

Publication Number WO/2004/001582
Publication Date 31.12.2003
International Application No. PCT/US2003/008528
International Filing Date 20.03.2003
Chapter 2 Demand Filed 20.01.2004
IPC
H01L 21/677 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
B65G 1/0457
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
1Storing articles, individually or in orderly arrangement, in warehouses or magazines
02Storage devices
04mechanical
0457with suspended load carriers
G06F 7/00
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
FELECTRIC DIGITAL DATA PROCESSING
7Methods or arrangements for processing data by operating upon the order or content of the data handled
H01L 21/67733
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67733Overhead conveying
H01L 21/67736
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67736Loading to or unloading from a conveyor
H01L 21/67769
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67763the wafers being stored in a carrier, involving loading and unloading
67769Storage means
H01L 21/68
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
68for positioning, orientation or alignment
Applicants
  • BROOKS AUTOMATION, INC. [US]/[US]
Inventors
  • DOHERTY, Brian, J.
  • MARIANO, Thomas, R.
  • SULLIVAN, Robert, P.
Agents
  • SCHURGIN, Stanley, M.
Priority Data
60/389,99319.06.2002US
60/417,99311.10.2002US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS
(FR) SYSTEME DE MANUTENTION AUTOMATISEE DE MATERIAUX DESTINE A LA MANUTENTION DE SEMI-CONDUCTEURS, UTILISANT UNE COMBINAISON DE CARROUSELS VERTICAUX ET DE PALANS AERIENS
Abstract
(EN) A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining at least one predetermined route. The predetermined route passes over the vertical carousel stocker, which allows the overhead transport vehicle to access one or more WIP parts directly from one of the carousel storage bins. The selected carousel storage bin is positioned at the top of the vertical carousel stocker underneath the suspended track. Next, the overhead hoist transport vehicle is moved along the suspended track to a position above the selected carousel storage bin. The overhead hoist is then lowered parallel to the longitudinal axis of the vertical carousel stocker toward the selected storage bin.Finally, the overhead hoist is operated to pick the desired WIP lot directly from the carousel storage bin, or to place one or more WIP lots in the storage bin.
(FR) L'invention concerne un système de manutention automatisée de matériaux hautement efficace (AMHS) permettant à un véhicule de transport à palan aérien de directement charger et décharger des produits en cours de production vers ou à partir d'une ou de plusieurs unités de stockage de produits en cours de production utilisés dans le système. Le système de manutention comprend un sous-système de transport à palan aérien et au moins dispositif de stockage équipé d'un carrousel vertical comportant une pluralité de cellules de stockage. Le sous-système de transport à palan aérien comprend un véhicule de transport à palan aérien se déplaçant le long d'un circuit aérien décrivant au moins un trajet prédéterminé. Le trajet prédéterminé passe par dessus le dispositif de stockage vertical, ce qui permet au véhicule de transport aérien d'accéder directement à un ou plusieurs des produits en cours de production depuis une des cellules de stockage du carrousel. La cellule de stockage sélectionnée du carrousel est placée au sommet du dispositif de stockage équipé du carrousel vertical, sous le circuit aérien. Ensuite, le véhicule de transport à palan aérien est déplacé le long du circuit aérien vers une position située au-dessus de la cellule de stockage sélectionnée du carrousel. Le palan aérien est par la suite abaissé parallèlement à l'axe longitudinal du dispositif de stockage équipé du carrousel vertical, vers la cellule de stockage sélectionnée. Finalement, le palan aérien est utilisé pour saisir le lot en cours de production directement dans la cellule de stockage du carrousel ou pour placer un ou plusieurs lots en cours de production dans la cellule de stockage.
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