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1. (WO2003075041) OPTICAL MEASUREMENTS OF LINE EDGE ROUGHNESS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2003/075041    International Application No.:    PCT/IL2003/000167
Publication Date: 12.09.2003 International Filing Date: 04.03.2003
IPC:
G01B 11/00 (2006.01), G01N 21/956 (2006.01), G03F 7/20 (2006.01)
Applicants: NOVA MEASURING INSTRUMENTS LTD. [IL/IL]; Weizmann Science Park, P.O. Box 266th, 76100 Rehovoth (IL) (For All Designated States Except US).
BRILL, Boaz [IL/IL]; (IL) (For US Only)
Inventors: BRILL, Boaz; (IL)
Agent: KORSHUNOV, Oleg; Nova Measuring Instruments LTD., Weizmann Science Park, P.O. Box 266, 76100 Rehovoth (IL)
Priority Data:
148485 04.03.2002 IL
Title (EN) OPTICAL MEASUREMENTS OF LINE EDGE ROUGHNESS
(FR) MESURES OPTIQUES DES IRREGULARITES DE BORD DE LIGNE
Abstract: front page image
(EN)A method and system for optical measurements of line edge roughness (LER) of patterned structures based on illuminating the structure with incident radiation and detecting a spectral response of the structure, and further applying software and/or hardware utilities for deriving information representative of said line edge roughness parameter/s from said spectral response of the structure
(FR)L'invention concerne un procédé et un système de mesure optique des irrégularités de bord de ligne (LER) dans des structures à motifs. Ce procédé consiste d'abord à éclairer la structure avec un rayonnement incident pour détecter une réponse spectrale de la structure, et à appliquer ensuite un logiciel/matériel utilitaire pour obtenir des informations associées aux paramètres desdites irrégularités de bord de ligne, à partir de la réponse spectrale de la structure.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, OM, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)