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Machine translation
1. (WO2003073497) TREATMENT SUBJECT RECEIVING VESSEL BODY, AND TREATING SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2003/073497    International Application No.:    PCT/JP2003/002380
Publication Date: 04.09.2003 International Filing Date: 28.02.2003
Chapter 2 Demand Filed:    22.07.2003    
IPC:
H01L 21/00 (2006.01)
Applicants: TOKYO ELECTRON LIMITED [JP/JP]; 3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481 (JP) (For All Designated States Except US).
KASAI, Shigeru [JP/JP]; (JP) (For US Only).
ITOH, Masahide [JP/JP]; (JP) (For US Only).
NAGASAWA, Shunro [JP/JP]; (JP) (For US Only)
Inventors: KASAI, Shigeru; (JP).
ITOH, Masahide; (JP).
NAGASAWA, Shunro; (JP)
Agent: YOSHITAKE, Kenji; Kyowa Patent & Law Office, Room 323, Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-0005 (JP)
Priority Data:
2002-54540 28.02.2002 JP
Title (EN) TREATMENT SUBJECT RECEIVING VESSEL BODY, AND TREATING SYSTEM
(FR) CORPS DE CUVE RECEVANT UN MILIEU A TRAITER ET SYSTEME DE TRAITEMENT
Abstract: front page image
(EN)A treatment subject receiving vessel body (72) comprises a portable vessel main body (92), a treatment subject support member (100) installed in the vessel main body and capable of supporting a plurality of treatment subjects (W), a joining port (96) formed in one side surface of the vessel main body and communicating with the interior of the vessel main body, an openable/closable gate valve (94) installed in the joining port, and an exhaust port (108) made openable/closable to be capable of exhausting the vessel main body. When the gate valve and exhaust port are closed, the vessel main body is brought to the sealed state.
(FR)L'invention concerne une cuve (72) recevant un milieu à traiter . Cette cuve comprend un corps (92) de cuve principale, un élément de support (100) du milieu à traiter, installé dans le corps de cuve principale et pouvant supporter plusieurs milieux à traiter (W). Un orifice contigu (96) est ménagé dans une surface latérale du corps de cuve et communique avec l'intérieur du corps de cuve, et un clapet obturateur (94) pouvant s'ouvrir et se fermer, est monté dans cet orifice, et un orifice d'échappement (108) pouvant s'ouvrir et se refermer assure l'échappement du corps de cuve principale. Lorsque le clapet obturateur et l'orifice d'échappement sont fermés, le corps de cuve principale est placé dans un état d'étanchéité.
Designated States: KR, US.
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)