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1. (WO2003058163) SYSTEM AND METHOD FOR INSPECTION USING WHITE LIGHT INTEREROMETRY

Pub. No.:    WO/2003/058163    International Application No.:    PCT/US2001/043178
Publication Date: Jul 17, 2003 International Filing Date: Dec 5, 2001
IPC: G01B 11/24
G01N 21/95
Applicants: SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS, INC.
MATHUR, Sanjeev
CHANG, Chu-Yin
Inventors: MATHUR, Sanjeev
CHANG, Chu-Yin
Title: SYSTEM AND METHOD FOR INSPECTION USING WHITE LIGHT INTEREROMETRY
Abstract:
A system for inspecting components is provided. The system includes an image data system that generates image data of the component, such as from a position overlooking the top of a bumped wafer. An interferometry inspection system is connected to the image data system and receives the image data, and analyzes the image data to locate interference fringing that is used to determine the surface coordinates of the bump contacts.