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Machine translation
1. (WO2003008301) 300MM SINGLE STACKABLE FILM FRAME CARRIER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2003/008301    International Application No.:    PCT/US2002/022413
Publication Date: 30.01.2003 International Filing Date: 15.07.2002
Chapter 2 Demand Filed:    07.02.2003    
IPC:
H01L 21/673 (2006.01)
Applicants: ENTEGRIS, INC. [US/US]; 3500 Lyman Boulevard, Chaska, MN 55318 (US) (For All Designated States Except US).
NIGG, James [US/US]; (US) (For US Only).
ZABKA, Michael [US/US]; (US) (For US Only)
Inventors: NIGG, James; (US).
ZABKA, Michael; (US)
Agent: CHRISTENSEN, Douglas, J.; Patterson, Thuente, Skaar & Christensen, P.A., 4800 IDS Center, 80 South Eighth Street, Minneapolis, MN 55402-2100 (US)
Priority Data:
60/305,639 15.07.2001 US
10/195,134 12.07.2002 US
Title (EN) 300MM SINGLE STACKABLE FILM FRAME CARRIER
(FR) SUPPORT DE CADRE DE FILM EMPILABLE SIMPLE DE 300 MM
Abstract: front page image
(EN)An interlockable film frame carrier (100) has central (106) and periphal (108) portions for securely storing a film frame (194) supporting a film (196), a semiconductor wafer (198) disposed on the film. The central portion (106) has structure for supporting the semiconductor wafer and for allowing access to a lower surface of the stored film frame. The peripheral portion (108) of the film frame carrier (100) includes structures for supporting a peripheral portion of the film frame and matable stacking members (103). When the film frame is stored, two film frame carriers are interlocked by mating the stacking members.
(FR)L'invention concerne un support de cadre de film à emboîtement réciproque (100) comprenant des parties centrale (106) et périphérique (108) permettant de stocker en toute sécurité un cadre de film (194) assurant le support d'un film (196), une tranche de semi-conducteur (198) étant disposée sur ce film. La partie centrale (106) comprend une structure destinée à supporter la tranche de semi-conducteur et à fournir un accès à une surface inférieure du cadre de film stocké. La partie périphérique (108) du support de cadre de film (100) comprend des structures destinées à supporter une partie périphérique du cadre de film ainsi que des éléments d'empilement accouplables (103). Lorsque le cadre de film est stocké, deux supports de cadre de film sont emboîtés par accouplement des éléments d'empilement.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, OM, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)