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Machine translation
1. (WO2003007346) CLEAN METHOD AND APPARATUS FOR VACUUM HOLDING OF SUBSTRATES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2003/007346    International Application No.:    PCT/US2002/021828
Publication Date: 23.01.2003 International Filing Date: 10.07.2002
Chapter 2 Demand Filed:    17.04.2003    
IPC:
H01L 21/00 (2006.01), H01L 21/687 (2006.01)
Applicants: ASYST TECHNOLOGIES, INC. [US/US]; 48761 Kato Road, Fremont, CA 94538 (US)
Inventors: KROLAK, Michael; (US)
Agent: MILLER, Mark, E.; O'Melveny & Myers LLP, 275 Battery Street, San Francisco, CA 94111 (US)
Priority Data:
09/905,490 13.07.2001 US
Title (EN) CLEAN METHOD AND APPARATUS FOR VACUUM HOLDING OF SUBSTRATES
(FR) PROCEDE ET APPAREIL DE NETTOYAGE POUR LA MISE SOUS VIDE DE SUBSTRATS
Abstract: front page image
(EN)A system for preventing contaminants and particulates from coming into contact with a back side of a workpiece as the workpiece is vacuum held on a chuck or robotic end effector.
(FR)L'invention se rapporte à un système qui permet d'empêcher que des contaminants et des particules ne viennent en contact avec le face arrière d'un élément lorsque ce dernier est mis sous vide sur un terminal de mandrin ou un terminal robotique.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, OM, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, UZ, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)