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1. (WO2003005097) PROJECTION OPTICAL SYSTEM AND EXPOSURE DEVICE HAVING THE PROJECTION OPTICAL SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2003/005097    International Application No.:    PCT/JP2002/005532
Publication Date: 16.01.2003 International Filing Date: 05.06.2002
Chapter 2 Demand Filed:    01.10.2002    
IPC:
G02B 17/06 (2006.01), G02B 17/08 (2006.01), G03F 7/20 (2006.01)
Applicants: NIKON CORPORATION [JP/JP]; 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331 (JP) (For All Designated States Except US).
TAKAHASHI, Tomowaki [JP/JP]; (JP) (For US Only)
Inventors: TAKAHASHI, Tomowaki; (JP)
Agent: INOUE, Yoshio; 3F, Garoh Bldg., 1-4, Nihonbashi 3-chome, Chuo-ku, Tokyo 103-0027 (JP)
Priority Data:
2001-203046 04.07.2001 JP
Title (EN) PROJECTION OPTICAL SYSTEM AND EXPOSURE DEVICE HAVING THE PROJECTION OPTICAL SYSTEM
(FR) SYSTEME OPTIQUE DE PROJECTION ET APPAREIL D'EXPOSITION DOTE DU SYSTEME OPTIQUE DE PROJECTION
Abstract: front page image
(EN)A projection optical system having six reflectors (CM1 to CM6) and forming the reduced image of an image on a first surface (4) on a second surface (7), comprising a first reflection imaging optical system (G1) for forming an intermediate image of the image on the first surface and a second reflection imaging optical system (G2) for forming the image of the intermediate image on the second surface, wherein the first reflection imaging optical system further comprising a pair of convex reflectors (CM2, CM3) disposed opposedly to each other.
(FR)L'invention concerne un système optique de projection possédant six réflecteurs (CM1 à CM 6) formant l'image réduite d'une image sur une première surface (4) sur une seconde surface (7). Ce système comprend un premier système (G1) optique d'imagerie de réflexion afin de former une image intermédiaire de l'image sur la première surface et un second système (G2) optique d'imagerie de réflexion afin de former l'image de l'image intermédiaire sur la seconde surface. Le premier système optique d'imagerie de réflexion est également doté d'une paire de réflecteurs (CM2, CM3) convexes disposés l'un en face de l'autre.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, OM, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)