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1. WO2002056083 - METHOD FOR MEASURING THE MICRORELIEF OF AN OBJECT AND OPTICAL CHARACTERISTICS OF NEAR-SURFACE LAYER, MODULATION INTERFERENCE MICROSCOPE FOR CARRYING OUT SAID METHOD

Publication Number WO/2002/056083
Publication Date 18.07.2002
International Application No. PCT/RU2001/000024
International Filing Date 23.01.2001
Chapter 2 Demand Filed 14.08.2002
IPC
G01B 11/00 2006.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
G01B 11/06 2006.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width, or thickness
06for measuring thickness
G01B 11/30 2006.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
CPC
G01B 11/00
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
G01B 11/0616
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width or thickness
06for measuring thickness ; ; e.g. of sheet material
0616of coating
G01B 11/30
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
Applicants
  • ANDREEV, Vladimir Andreevich [RU]/[RU]
  • INDUKAEV, Konstantin Vasilievich [RU]/[RU]
  • OSIPOV, Pavel Albertovich [RU]/[RU]
Inventors
  • ANDREEV, Vladimir Andreevich
  • INDUKAEV, Konstantin Vasilievich
  • OSIPOV, Pavel Albertovich
Agents
  • KORNILOV, Anatoly Vasilievich
Priority Data
200110069815.01.2001RU
Publication Language Russian (ru)
Filing Language Russian (RU)
Designated States
Title
(EN) METHOD FOR MEASURING THE MICRORELIEF OF AN OBJECT AND OPTICAL CHARACTERISTICS OF NEAR-SURFACE LAYER, MODULATION INTERFERENCE MICROSCOPE FOR CARRYING OUT SAID METHOD
(FR) PROCEDE DE MESURE DU MICRORELIEF D'UN OBJET ET DES CARACTERISTIQUES OPTIQUES D'UNE COUCHE PRES DE LA SURFACE ET MICROSCOPE INTERFERENTIEL A MODULATION POUR METTRE EN OEUVRE CE PROCEDE
Abstract
(EN) The invention relates to optical engineering, in particular to methods for measuring a microrelief, the distribution of optical material constants of a near-surface layer and can be used for microelectronic engineering, nanotechnology, material science, medicine and biology. The aim of the invention is to improve spatial resolution for measuring geometrical parameters of the relief and the distribution of the optical material constants, extend the range of defined constants including optical anisotropy constants, significantly increasing the accuracy of definition of the material constant and extending the number of objects studied. The inventive method for mesuring microrelief and optical characteristics of the near-surface layer and a modulation interference microscope for carrying out said method are also disclosed.
(FR) La présente invention concerne l'optique, en particulier des procédés pour mesurer le microrelief et déterminer la distribution des constantes optiques matérielles d'une couche près de la surface d'un objet; elle peut s'utiliser dans des recherches en micro-électronique, en nanotechnologie, en science des matériaux, en médecine et en biologie. Le but de l'invention est d'élargir, d'une part, la résolution spatiale pendant la détermination des paramètres géométriques du relief et, d'autre part, la distribution des constantes optiques matérielles, d'augmenter le nombre de constantes à déterminer, y compris les constantes d'anisotropie optique, d'améliorer sensiblement l'exactitude de mesure des constantes matérielles et d'élargir le cercle d'objets étudiés. Un procédé de mesure du microrelief d'un objet et des caractéristiques optiques de la couche près de la surface ainsi qu'un microscope interférentiel à modulation sont également présentés.
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