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1. WO2002040936 - INTERFEROMETRIC MEASURING DEVICE

Publication Number WO/2002/040936
Publication Date 23.05.2002
International Application No. PCT/DE2001/004184
International Filing Date 07.11.2001
Chapter 2 Demand Filed 29.05.2002
IPC
G01B 9/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers
G01B 11/24 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
CPC
G01B 11/2441
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
2441using interferometry
G01B 9/02002
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02001characterised by manipulating or generating specific radiation properties
02002Frequency variation
G01B 9/02044
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02041characterised by particular imaging or detection techniques
02044Imaging in the frequency domain, e.g. by using a spectrometer
G01B 9/02057
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
02056Passive error reduction, i.e. not varying during measurement, e.g. by constructional details of optics
02057by using common path configuration, i.e. reference and object path almost entirely overlapping
G01B 9/02065
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
02062Active error reduction, i.e. varying with time
02064by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
02065using a second interferometer before or after measuring interferometer
G01B 9/0209
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
0209Non-tomographic low coherence interferometers, e.g. low coherence interferometry, scanning white light interferometry, optical frequency domain interferometry or reflectometry
Applicants
  • ROBERT BOSCH GMBH [DE]/[DE] (AllExceptUS)
  • DRABAREK, Pawel [DE]/[DE] (UsOnly)
Inventors
  • DRABAREK, Pawel
Priority Data
100 57 540.420.11.2000DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) INTERFEROMETRISCHE MESSVORRICHTUNG
(EN) INTERFEROMETRIC MEASURING DEVICE
(FR) DISPOSITIF DE MESURE INTERFÉROMÉTRIQUE
Abstract
(DE)
Die Erfindung bezieht sich auf eine interferometrische Messvorrichtung zum Messen von Oberflächenkenngrössen, Formen, Abständen, Abstandsänderungen, z.B. Schwingungen, von Messobjekten (7) mit einem Sondenteil (6). Eine hinsichtlich der handhabung und einer störungsfreien Abtastung günstige Ausbildung besteht darin, dass der Sondenteil (6) in einen feststehenden Sondenteil (6.1) und einen mit diesem mechanisch und optisch gekoppelten rotierbaren Sondentiel (6.2) unterteilt ist und dass ein Strahlteiler (6.3; 6.3') zum Erzeugen eines Referenzstrahls und eines Messstrahis für die interferometrische Messung in dem rotierbaren Sondenteil (6.2) angeordnet ist.
(EN)
The invention relates to an interferometric measuring device for measuring surface characteristics, shapes, distances, distance variations, e.g. oscillations of measuring objects (7), by means of a probe part (6). The invention aims to provide a device which is easy to use and permits error-free scanning. To achieve this, the probe part (6) is subdivided into a fixed probe part (6.1) and a rotatable probe part (6.2) that is mechanically and optically coupled thereto and a beam splitter (6.3; 6.3') for creating a reference beam and a measuring beam for the interferometric measurement is located in the rotatable probe part (6.2).
(FR)
L'invention concerne un dispositif de mesure interférométrique destiné à la mesure au moyen d'un élément sonde (6) de grandeurs caractéristiques de surface, de formes, d'écarts, de variations d'écarts, par ex. d'oscillations, d'objets à mesurer (7). L'invention vise à mettre en oeuvre un tel dispositif de manipulation simple, permettant un balayage sans interférences. A cet effet, l'élément sonde (6) est divisé en une partie de sonde fixe (6.1) et en une partie de sonde rotative (6.2) couplée mécaniquement et optiquement à la partie de sonde fixe, et un séparateur de faisceau (6.3, 6.3') destiné à produire un faisceau de référence et un faisceau de mesure pour la mesure interférométrique est logé dans la partie de sonde rotative (6.2).
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