Processing

Please wait...

Settings

Settings

Goto Application

1. WO2002037085 - PROCESS CONTROL METHODS FOR USE WITH E-BEAM FABRICATION TECHNOLOGY

Publication Number WO/2002/037085
Publication Date 10.05.2002
International Application No. PCT/US2001/031282
International Filing Date 04.10.2001
Chapter 2 Demand Filed 04.06.2002
IPC
G01N 21/17 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
G01N 25/72 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25Investigating or analysing materials by the use of thermal means
72Investigating presence of flaws
G01N 29/24 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
24Probes
H01J 37/30 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30Electron-beam or ion-beam tubes for localised treatment of objects
CPC
G01N 2021/8472
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
8472Investigation of composite materials
G01N 21/171
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
171with calorimetric detection, e.g. with thermal lens detection
G01N 2291/0231
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2291Indexing codes associated with group G01N29/00
02Indexing codes associated with the analysed material
023Solids
0231Composite or layered materials
G01N 2291/02881
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2291Indexing codes associated with group G01N29/00
02Indexing codes associated with the analysed material
028Material parameters
02881Temperature
G01N 25/72
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25Investigating or analyzing materials by the use of thermal means
72Investigating presence of flaws
G01N 29/2418
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details ; , e.g. general constructional or apparatus details
24Probes
2418using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
Applicants
  • HRL LABORATORIES, LLC [US]/[US] (AllExceptUS)
  • PEPPER, David, M. [US]/[US] (UsOnly)
Inventors
  • PEPPER, David, M.
Agents
  • BERG, Richard, P.
Priority Data
09/707,44406.11.2000US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PROCESS CONTROL METHODS FOR USE WITH E-BEAM FABRICATION TECHNOLOGY
(FR) PROCEDES DE CONTROLE DE PROCESSUS UTILISES DANS LA TECHNOLOGIE DE FABRICATION A FAISCEAU ELECTRONIQUE
Abstract
(EN)
A method and apparatus for e-beam fabrication of a workpiece (20). A surface of the workpiece is impinged with a e-beam (32) during a manufacturing step in the manufacture of the workpiece. Simultaneously, the workpiece is optically sensed using thermal-wave imaging and/or ultrasound imaging techniques for process control of the workpiece. The e-beam impinging the workpiece in the manufacture of the workpiece provides substantially all the energy needed to be added to the workpiece to perform the optical sensing of the workpiece.
(FR)
L'invention concerne un procédé et un appareil de fabrication d'une pièce (20) à l'aide d'un faisceau électronique. Une surface de la pièce reçoit un faisceau électronique (32) au cours d'une étape de fabrication de la pièce. La pièce est simultanément contrôlée de manière optique au moyen de techniques d'imagerie à ondes thermiques et/ou d'imagerie ultrasonore afin de contrôler le processus de fabrication de la pièce. Le faisceau électronique venant en contact avec la pièce au cours de sa fabrication génère sensiblement toute l'énergie nécessaire à ajouter à la pièce afin de procéder au contrôle optique de la pièce.
Also published as
Latest bibliographic data on file with the International Bureau