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Machine translation
1. (WO2002030809) MICROMACHINED COMPONENT AND METHOD OF MANUFACTURE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/030809    International Application No.:    PCT/US2001/031067
Publication Date: 18.04.2002 International Filing Date: 04.10.2001
Chapter 2 Demand Filed:    04.04.2002    
IPC:
B81B 3/00 (2006.01), B81C 1/00 (2006.01)
Applicants: MOTOROLA, INC. [US/US]; 1303 East Algonquin Road, Schaumburg, IL 60196 (US)
Inventors: GORRELL, Jonathan, F.; (US).
NIELSEN, Gordana, S.; (US)
Agent: KOCH, William, E.; Motorola, Inc., Corporate Law Department, Intellectual Property Section, 3102 North 56th Street, MD: AZ11/56-238, Phoenix, AZ 85018 (US)
Priority Data:
09/680,777 06.10.2000 US
Title (EN) MICROMACHINED COMPONENT AND METHOD OF MANUFACTURE
(FR) COMPOSANT MICRO-USINE ET PROCEDE DE FABRICATION
Abstract: front page image
(EN)A method of manufacturing a micromachined component includes using a first liquid to etch a first layer (140) located underneath a second layer (150), exposing the second layer to a second liquid that is inorganic and miscible in carbon dioxide, and supercritical drying the micromachined component with carbon dioxide.
(FR)L'invention concerne un procédé de fabrication d'un composant micro-usiné consistant à employer un premier liquide pour attaquer une première couche (140) située sous une deuxième couche (150), à exposer la deuxième couche à un deuxième liquide minéral et miscible dans du dioxyde de carbone, et à effectuer un séchage supercritique du composant micro-usiné avec du dioxyde de carbone.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)