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Machine translation
1. (WO2002029883) METHOD TO DETECT SURFACE METAL CONTAMINATION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/029883    International Application No.:    PCT/GB2001/004454
Publication Date: 11.04.2002 International Filing Date: 05.10.2001
Chapter 2 Demand Filed:    21.02.2002    
IPC:
G01N 21/95 (2006.01)
Applicants: AOTI OPERATING COMPANY, INC. [US/US]; Suite 207 131 N.W. Hawthorne Avenue Bend, OR 97701 (US) (For All Designated States Except US).
HIGGS, Victor [GB/GB]; (GB) (For US Only)
Inventors: HIGGS, Victor; (GB)
Agent: NOVAGRAAF PATENTS LIMITED; The Crescent 54 Blossom Street York YO24 1AP (GB)
Priority Data:
0024537.3 06.10.2000 GB
0028222.8 18.11.2000 GB
Title (EN) METHOD TO DETECT SURFACE METAL CONTAMINATION
(FR) METHODE DE DETECTION DE CONTAMINATION METALLIQUE DE SURFACE
Abstract: front page image
(EN)A method for detecting surface or near surface metal contamination in a semiconductor or silicon structure is described in which the structure or a part thereof is exposed to an excitation beam of predetermined wavelength and collecting luminescence from the structure in as the form of PL map having a substantially uniform PL intensity level provided by the semiconductor; and inspecting the map for one or more regions of enhanced PL intensity identifying characteristic surface or near surface metal contamination. In particular, the method is applied as an in-process quality control or as a quality control of processed structures such as interconnects.
(FR)L'invention concerne une méthode permettant de détecter la contamination métallique de surface ou proche de la surface au niveau d'un semi-conducteur ou d'une structure en silicone selon laquelle la structure ou une partie de ladite structure est exposée à un faisceau excitateur de longueur d'onde prédéfinie, ladite méthode absorbant la luminescence de la structure sous forme de carte photoluminescente possédant un niveau sensiblement uniforme d'intensité photoluminescente provenant du semi-conducteur et inspectant la carte sur une ou plusieurs région(s) d'intensité photoluminescente accrue, identifiant ainsi la contamination métallique caractéristique de surface ou proche de la surface. Cette méthode est particulièrement appliquée en tant que contrôle qualité en cours de fabrication ou contrôle qualité des structures traitées comme les interconnexions.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)