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1. (WO2002027809) DIELECTRIC THIN FILM ELEMENT, ACTUATOR COMPRISING IT, INK JET HEAD, AND INK JET RECORDER.
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/027809    International Application No.:    PCT/JP2001/008402
Publication Date: 04.04.2002 International Filing Date: 26.09.2001
Chapter 2 Demand Filed:    22.02.2002    
IPC:
B41J 2/14 (2006.01), H01L 41/24 (2006.01)
Applicants: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. [JP/JP]; 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 (JP) (For All Designated States Except US).
KAMADA, Takeshi [JP/JP]; (JP) (For US Only).
TORII, Hideo [JP/JP]; (JP) (For US Only).
TAKAYAMA, Ryoichi [JP/JP]; (JP) (For US Only)
Inventors: KAMADA, Takeshi; (JP).
TORII, Hideo; (JP).
TAKAYAMA, Ryoichi; (JP)
Agent: IKEUCHI SATO & PARTNER PATENT ATTORNEYS; 26th Floor, OAP TOWER 8-30, Tenmabashi 1-chome, Kita-ku Osaka-shi, Osaka 530-6026 (JP)
Priority Data:
2000-293803 27.09.2000 JP
Title (EN) DIELECTRIC THIN FILM ELEMENT, ACTUATOR COMPRISING IT, INK JET HEAD, AND INK JET RECORDER.
(FR) ELEMENT A PELLICULE DIELECTRIQUE MINCE, ACTIONNEUR COMPRENANT CET ELEMENT, TETE A JET D'ENCRE ET ENREGISTREUR A JET D'ENCRE
Abstract: front page image
(EN)A dielectric thin film element for controlling the crystal orientation of a dielectric thin film and optimizing various characteristics such as electrical characteristics. This dielectric thin film element (10) comprises a substrate (11), a first electrode (12) formed on the substrate (11), a dielectric thin film (13) formed on the first electrode (12), and a second electrode (14) formed on the dielectric thin film (13) and is manufactured with the substrate (11) kept heated. A material having a predetermined coefficient of thermal expansion is used as the material of the substrate (11), and the crystal orientation of the dielectric thin film (13) is controlled by the coefficient of thermal expansion of the substrate (11).
(FR)L'invention concerne un élément à pellicule diélectrique mince conçu pour commander l'orientation des cristaux d'une pellicule diélectrique mince et pour optimiser diverses caractéristiques, telles que les caractéristiques électriques. Cet élément (10) à pellicule diélectrique mince comprend un substrat (11), une première électrode (12) formée sur le substrat (11), une pellicule diélectrique (13) mince formée sur la première électrode (12), et une seconde électrode (14) formée sur la pellicule diélectrique (13) mince, le substrat (11) restant chauffé pendant la fabrication de l'élément susmentionné. Un matériau présentant un coefficient prédéterminé d'expansion thermique est utilisé pour constituer le substrat (11), l'orientation des cristaux de la pellicule (13) étant commandée par le coefficient d'expansion thermique du substrat (11).
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)