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Machine translation
1. (WO2002027767) FLUID DELIVERY RING AND METHODS FOR MAKING AND IMPLEMENTING THE SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/027767    International Application No.:    PCT/US2001/028996
Publication Date: 04.04.2002 International Filing Date: 12.09.2001
Chapter 2 Demand Filed:    22.04.2002    
IPC:
H01L 21/00 (2006.01)
Applicants: LAM RESEARCH CORPORTATION [US/US]; 4650 Cushing Parkway Fremont, CA 94538 (US)
Inventors: SMITH, Stephen, M.; (US).
TREUR, Randolph, E.; (US)
Agent: PENILLA, Albert, S.; Martine & Penilla, LLP Suite 170 710 Lakeway Drive Sunnyvale, CA 94085 (US)
Priority Data:
09/672,173 27.09.2000 US
Title (EN) FLUID DELIVERY RING AND METHODS FOR MAKING AND IMPLEMENTING THE SAME
(FR) ANNEAU DE DISTRIBUTION DE FLUIDE ET PROCEDES DE FABRICATION ET DE MISE EN OEUVRE
Abstract: front page image
(EN)A fluid delivery module for use in a substrate is provided. The fluid delivery module includes a process bowl designed to contain a substrate to be prepared. The process bowl has a bottom wall and a sidewall. The fluid delivery module further includes a fluid delivery ring configured to be attached to the sidewall of the process bowl. The fluid delivery ring includes a plurality of inlet and outlet pairs. Each of the plurality of inlet and outlet pairs is defined in the fluid ring and is designed to receive a respective supply tube. Each respective supply tube has an end that terminates at each of the outlets of the fluid delivery ring and is configured to direct fluid onto a surface of the substrate.
(FR)L'invention concerne un module de distribution de fluide utilisé pour le traitement d'un substrat. Ce module comprend un entonnoir de traitement conçu pour accueillir un substrat. L'entonnoir comporte un fond et une paroi latérale. Le module comporte en outre un anneau de distribution de fluide fixé à la paroi latérale de l'entonnoir. L'anneau comprend une pluralité de paires d'entrée et de sortie. Chaque paire, définie dans l'anneau, reçoit un tube d'alimentation respectif doté d'une extrémité se terminant à chacune des sorties de l'anneau, et conçu pour diriger le fluide sur une surface du substrat.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)