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1. (WO2002027305) FLAW DETECTING DEVICE AND COMPUTER-READABLE STORAGE MEDIUM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/027305    International Application No.:    PCT/JP2001/008295
Publication Date: 04.04.2002 International Filing Date: 25.09.2001
Chapter 2 Demand Filed:    19.04.2002    
IPC:
G01N 21/95 (2006.01), G01N 21/956 (2006.01)
Applicants: OLYMPUS OPTICAL CO., LTD. [JP/JP]; 43-2, Hatagaya 2-chome Shibuya-ku, Tokyo 151-0072 (JP) (For All Designated States Except US).
OTA, Yoshinari [JP/JP]; (JP) (For US Only)
Inventors: OTA, Yoshinari; (JP)
Agent: SUZUYE, Takehiko; c/o SUZUYE & SUZUYE 7-2, Kasumigaseki 3-chome Chiyoda-ku, Tokyo 100-0013 (JP)
Priority Data:
2000-292938 26.09.2000 JP
Title (EN) FLAW DETECTING DEVICE AND COMPUTER-READABLE STORAGE MEDIUM
(FR) DISPOSITIF DE DETECTION DE DEFAUTS
Abstract: front page image
(EN)A flaw detecting device which comprises an illuminating unit for applying an illuminating light to an inspection object and an imaging unit for imaging a diffracted light from the inspection object, and which inspects the inspection object for any flaw from image data imaged by the imaging unit, wherein the device further comprises a diffraction angle calculating unit for determining, based on design information of the inspection object, a diffraction angle, with respect to the inspection object, of the illuminating light optimum for imaging the diffracted light, and an illumination setting unit for setting the incident angle of the illuminating unit to the diffraction angle calculated by the diffraction angle calculating unit.
(FR)L'invention porte sur un dispositif de détection de défauts comportant: une unité d'éclairage de l'objet à contrôler, et une unité d'imagerie de la lumière diffractée par l'objet qui détecte d'éventuels défauts à partir des données d'image fournies par l'unité d'imagerie. Le dispositif comporte en outre une unité qui calcule, en fonction des informations de représentation de l'objet, l'angle de diffraction par rapport à l'objet pour la lumière incidente donnant la diffraction optimale, ainsi qu'une unité de réglage de l'angle d'incidence de l'unité d'éclairage en fonction de l'angle de diffraction calculé.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)