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Machine translation
1. (WO2002027059) SYSTEM AND METHOD FOR CONTROLLING MOVEMENT OF A WORKPIECE IN A THERMAL PROCESSING SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/027059    International Application No.:    PCT/GB2001/003806
Publication Date: 04.04.2002 International Filing Date: 24.08.2001
Chapter 2 Demand Filed:    24.04.2002    
IPC:
C30B 31/18 (2006.01), H01L 21/00 (2006.01)
Applicants: AXCELIS TECHNOLOGIES, INC. [US/US]; 55 Cherry Hill Drive, Beverly, MA 01915 (US).
EATON LIMITED [GB/GB]; Norfolk Street, P.O. Box 22, Worsley Road North, Worsley, Manchester M28 3ET (GB) (CA only)
Inventors: SHAJII, Ali; (US).
MATTHEWS, Brian; (US).
HEBB, Jeffrey, Paul; (US).
DANIS, John; (US)
Agent: BURKE, Steven, D.; R.G.C. Jenkins & Co., 26 Caxton Street, London SW1H ORJ (GB)
Priority Data:
09/670,712 27.09.2000 US
Title (EN) SYSTEM AND METHOD FOR CONTROLLING MOVEMENT OF A WORKPIECE IN A THERMAL PROCESSING SYSTEM
(FR) SYSTEME ET PROCEDE DE COMMANDE DU MOUVEMENT D'UNE PIECE DANS UN SYSTEME DE TRAITEMENT THERMIQUE
Abstract: front page image
(EN)A system and method for processing a workpiece in a thermal processing furnace by measuring the temperature of the workpiece in the thermal processing furnace, and based upon an intended temperature profile and the measured temperature of the workpiece, moving the workpiece through the furnace to heat process the workpiece generally according to the intended temperature profile.
(FR)L'invention concerne un système et un procédé de traitement d'une pièce dans un four de traitement thermique. Le procédé consiste à mesurer la température de la pièce dans un tel four et, en fonction d'un profil de température recherché et de la température mesurée de la pièce, à déplacer celle-ci dans le four, de manière à la traiter de façon thermique, généralement conformément au profil de température recherché.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)