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1. WO2002024412 - GRINDING ARRANGEMENT AND METHOD FOR REAL-TIME VIEWING OF SAMPLES DURING CROSS-SECTIONING

Publication Number WO/2002/024412
Publication Date 28.03.2002
International Application No. PCT/US2001/024681
International Filing Date 06.08.2001
Chapter 2 Demand Filed 25.02.2002
IPC
B24B 9/06 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
9Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
02characterised by a special design with respect to properties of materials specific to articles to be ground
06of non-metallic inorganic material, e.g. stone, ceramics, porcelain
B24B 49/04 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
49Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
02according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
04involving measurement of the workpiece at the place of grinding during grinding operation
B24B 49/12 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
49Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
12involving optical means
G01N 21/95 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
95characterised by the material or shape of the object to be examined
CPC
B24B 49/04
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
49Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
02according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
04involving measurement of the workpiece at the place of grinding during grinding operation
B24B 49/12
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
49Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
12involving optical means
B24B 9/065
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
9Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
02characterised by a special design with respect to properties of materials specific to articles to be ground
06of non-metallic inorganic material, e.g. stone, ceramics, porcelain
065of thin, brittle parts, e.g. semiconductors, wafers
G01N 21/8806
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
8806Specially adapted optical and illumination features
G01N 21/9501
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
95characterised by the material or shape of the object to be examined
9501Semiconductor wafers
G01N 21/9505
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
95characterised by the material or shape of the object to be examined
9501Semiconductor wafers
9505Wafer internal defects, e.g. microcracks
Applicants
  • ADVANCED MICRO DEVICES, INC. [US]/[US]
Inventors
  • MORKEN, David, Bruce
  • HUDSON, Russell, L.
Agents
  • RODDY, Richard, J.
  • PICKER, Madeline, M.
Priority Data
09/666,34121.09.2000US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) GRINDING ARRANGEMENT AND METHOD FOR REAL-TIME VIEWING OF SAMPLES DURING CROSS-SECTIONING
(FR) DISPOSITIF DE BROYAGE ET PROCEDE DE VISUALISATION EN TEMPS REEL D'ECHANTILLONS LORS DE LA COUPE TRANSVERSALE
Abstract
(EN)
Metallographic samples (12) are cross-sectioned to inspect internal features of the samples and to determine the cause of component failures. In order to reach an area of interest (10) that is to be inspected, the cross-sections undergo grinding. Conventional grinding techniques require that a metallographic sample be removed from the grinding apparatus and visually inspected in order to determine whether the area of interest has been reached. An improved grinding apparatus (100) and method of grinding, images the sample while it is being ground so that grinding does not have to be interrupted in order to determine how far grinding has progressed. Real-time monitoring of the grinding process allows precision control of grinding of meatallographic samples.
(FR)
Selon l'invention, des échantillons métallographiques (12) sont coupés transversalement afin d'étudier les caractéristiques intérieures des échantillons et de déterminer la cause de défauts de composants. Pour atteindre une zone d'intérêt (10) devant être étudiée, les sections transversales subissent un broyage. Les procédés de broyage habituels nécessitent qu'un échantillon métallographique soit retiré du dispositif de broyage et étudié visuellement afin de déterminer si la zone d'intérêt à été atteinte. Un dispositif (100) et un procédé de broyage améliorés permettent de réaliser une image de l'échantillon lors du broyage, ainsi, il n'est pas nécessaire d'interrompre le broyage pour déterminer le degré de progression du broyage. La surveillance en temps réel du procédé de broyage permet de contrôler précisément le broyage d'échantillons métallographiques.
Also published as
Latest bibliographic data on file with the International Bureau