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1. WO2002023248 - CONFOCAL POINT MICROSCOPE AND HEIGHT MEASURING METHOD USING THIS

Publication Number WO/2002/023248
Publication Date 21.03.2002
International Application No. PCT/JP2001/007868
International Filing Date 11.09.2001
IPC
G02B 21/00 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
CPC
G02B 21/0024
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
0004specially adapted for specific applications
002Scanning microscopes
0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
G02B 21/0044
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
0004specially adapted for specific applications
002Scanning microscopes
0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
0036Scanning details, e.g. scanning stages
0044moving apertures, e.g. Nipkow disks, rotating lens arrays
G02B 21/0068
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
0004specially adapted for specific applications
002Scanning microscopes
0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
0052Optical details of the image generation
0068arrangements using polarisation
Applicants
  • OLYMPUS OPTICAL CO., LTD. [JP]/[JP] (AllExceptUS)
  • EDA, Yukio [JP]/[JP] (UsOnly)
  • HISATA, Nahoko [JP]/[JP] (UsOnly)
  • MORITA, Terumasa [JP]/[JP] (UsOnly)
  • KAMIHARA, Yasuhiro [JP]/[JP] (UsOnly)
Inventors
  • EDA, Yukio
  • HISATA, Nahoko
  • MORITA, Terumasa
  • KAMIHARA, Yasuhiro
Agents
  • SUZUYE, Takehiko
Priority Data
2000-27508511.09.2000JP
2000-27508911.09.2000JP
2000-27509011.09.2000JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) CONFOCAL POINT MICROSCOPE AND HEIGHT MEASURING METHOD USING THIS
(FR) MICROSCOPE CONFOCAL ET PROCEDE DE MESURE DE HAUTEUR UTILISANT LEDIT MICROSCOPE
Abstract
(EN)
A confocal point microscope which applies an illuminating light beam to a sample via a confocal point disk providing a sectioning effect, and forms the image of a light beam from this sample on a photoelectric conversion means via the confocal point disk, and which comprises an object image forming optical system having an image forming lens for forming the image of the confocal point disk on the sample and a low-magnification object lens, and an image forming lens drive means for moving the image forming lens in an optical axis direction.
(FR)
L'invention concerne un microscope confocal qui applique un faisceau de lumière sur un échantillon, par l'intermédiaire d'un disque confocal à effet de sectionnement, et forme l'image d'un faisceau lumineux à partir de cet échantillon sur un moyen de conversion photoélectrique par l'intermédiaire du disque confocal. Ce microscope comprend un système optique imageur d'objet, équipé d'un objectif imageur conçu pour former l'image du disque confocal sur l'échantillon et d'un objectif à faible grossissement, et un moyen d'entraînement d'objectif imageur pour déplacer l'objectif imageur dans le sens d'un axe optique.
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