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1. WO2002021195 - METHOD AND SYSTEM FOR ULTRA-FAST SWITCHING OF OPTICAL SIGNALS

Publication Number WO/2002/021195
Publication Date 14.03.2002
International Application No. PCT/IL2001/000461
International Filing Date 22.05.2001
Chapter 2 Demand Filed 07.04.2002
IPC
G02B 6/35 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
24Coupling light guides
26Optical coupling means
35having switching means
G02B 26/08 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating or modulating
08for controlling the direction of light
CPC
G02B 26/0833
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08for controlling the direction of light
0816by means of one or more reflecting elements
0833the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
G02B 26/0841
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08for controlling the direction of light
0816by means of one or more reflecting elements
0833the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
0841the reflecting element being moved or deformed by electrostatic means
G02B 6/3518
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
24Coupling light guides
26Optical coupling means
35having switching means
351involving stationary waveguides with moving interposed optical elements
3512the optical element being reflective, e.g. mirror
3518the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
G02B 6/3556
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
24Coupling light guides
26Optical coupling means
35having switching means
354Switching arrangements, i.e. number of input/output ports and interconnection types
35543D constellations, i.e. with switching elements and switched beams located in a volume
3556NxM switch, i.e. regular arrays of switches elements of matrix type constellation
G02B 6/357
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
24Coupling light guides
26Optical coupling means
35having switching means
3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
3568characterised by the actuating force
357Electrostatic force
Y10S 977/708
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
977Nanotechnology
70Nanostructure
701Integrated with dissimilar structures on a common substrate
708with distinct switching device
Applicants
  • TERRA-OP LTD. [IL]/[IL]
Inventors
  • NAHUM, Assaf
  • OFRI, Atzmon
  • BEN-GAD, Eliezer
  • KOVALSKI, Igor
Agents
  • JEREMY M. BEN-DAVID & CO. LTD.
Priority Data
60/230,70007.09.2000US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD AND SYSTEM FOR ULTRA-FAST SWITCHING OF OPTICAL SIGNALS
(FR) PROCEDE ET SYSTEME DE COMMUTATION ULTRARAPIDE DE SIGNAUX OPTIQUES
Abstract
(EN)
The system can include one or more optical switching devices. Each optical switching device can achieve relatively high switching speeds such as between thirty (30) nano-seconds to fifty (50) nano-seconds with precise angular movement. The switching speed can be defined as the movement of an optical element from a first switching position to a second switching position. The relatively high switching speeds and precise angular movement of the optical element can be attributed to utilizing a combination of electrodes and membrane supports made from predefined materials that react to the electrodes. The optical switching device can be a microelectromechanical system (MEMS) device that can be fabricated by the adding or etching layers of materials such as in photolithography manufacturing techniques. The optical element can include a mirror made from reflective materials such as a layer of gold. The membrane supports can include planar strips fabricated from silicon based materials such as silicon nitride (Si3N4).
(FR)
L'invention concerne un système pouvant inclure un ou plusieurs dispositifs de commutation optique. Chaque dispositif de commutation optique peut atteindre des vitesses de commutation relativement élevées comprises entre trente (30) nanosecondes et cinquante (50) nanosecondes avec un déplacement angulaire précis. La vitesse de commutation peut être définie comme le déplacement d'un élément optique, d'une première position de commutation à une deuxième position de commutation. Les vitesses de commutation relativement élevées et le déplacement angulaire précis de l'élément optique peuvent être attribués à l'utilisation d'une combinaison d'électrodes et de supports de membrane faits de matières prédéfinies qui réagissent aux électrodes. Le dispositif de commutation optique peut être un dispositif à système microélectromécanique (MEMS) pouvant être fabriqué par l'ajout ou la gravure de couches de matières s'utilisant dans des techniques de fabrication photolithographiques. L'élément optique peut comprendre un miroir fait de matières réfléchissantes, p. ex. couche d'or. Les supports de membrane peuvent inclure des bandes planes élaborées à partir de matières à base de silicium, p. ex. nitrure de silicium (Si3N4).
Also published as
Latest bibliographic data on file with the International Bureau