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1. (WO2002009161) PROCESS FOR CLEANING CERAMIC ARTICLES
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2002/009161 International Application No.: PCT/US2001/023047
Publication Date: 31.01.2002 International Filing Date: 23.07.2001
Chapter 2 Demand Filed: 21.02.2002
IPC:
B08B 3/08 (2006.01) ,B08B 7/00 (2006.01) ,B08B 7/02 (2006.01) ,C04B 41/53 (2006.01) ,C04B 41/91 (2006.01)
Applicants: SAINT-GOBAIN CERAMICS & PLASTICS, INC.[US/US]; 1 New Bond Street Worcester, MA 01615-0137, US
Inventors: HAERLE, Andrew, G.; US
Agent: MIRABITO, A., Jason; Mintz, Levin, Cohn, Ferris, Glovsky and Popeo P.C. One Financial Center Boston, MA 02111, US
Priority Data:
09/621,92824.07.2000US
Title (EN) PROCESS FOR CLEANING CERAMIC ARTICLES
(FR) PROCEDE DE NETTOYAGE D'ARTICLES CERAMIQUES
Abstract: front page image
(EN) A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a chemical stripping agent and then using a pelletized CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface.
(FR) L'invention porte sur un procédé de nettoyage d'articles céramiques tels que des éléments de retenue SiC utilisés dans la fabrication de semi-conducteurs. Le procédé consiste à laver une pièce céramique vierge ou usagée avec un agent de décapage chimique et à mettre en oeuvre un processus de nettoyage au CO2 se présentant sous forme de pastilles sur le composant lavé à l'acide. Il s'est avéré que ce procédé permet de produire une pièce à très faible taux de contaminants métalliques ou particulaires sur sa surface.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, UZ, VN, YU, ZA, ZW
African Regional Intellectual Property Organization (ARIPO) (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)