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Machine translation
1. (WO2002008774) PROBE DRIVING METHOD, AND PROBE APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/008774    International Application No.:    PCT/JP2001/004875
Publication Date: 31.01.2002 International Filing Date: 08.06.2001
Chapter 2 Demand Filed:    08.06.2001    
IPC:
G01N 1/28 (2006.01), G01N 1/32 (2006.01), G01N 23/04 (2006.01), G01N 23/225 (2006.01), G01Q 10/00 (2010.01), G01Q 30/02 (2010.01), G01Q 30/04 (2010.01), G01Q 30/20 (2010.01), G01Q 60/44 (2010.01), G01R 1/06 (2006.01), G01R 31/28 (2006.01), H01J 37/28 (2006.01), H01L 21/66 (2006.01), G01R 31/311 (2006.01)
Applicants: HITACHI, LTD. [JP/JP]; 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 101-8010 (JP) (For All Designated States Except US).
HITACHI ULSI SYSTEMS CO., LTD. [JP/JP]; 22-1, Josuihoncho 5-chome Kodaira-shi, Tokyo 187-8522 (JP) (For All Designated States Except US).
TOMIMATSU, Satoshi [JP/JP]; (JP) (For US Only).
KOIKE, Hidemi [JP/JP]; (JP) (For US Only).
AZUMA, Junzo [JP/JP]; (JP) (For US Only).
ISHITANI, Tohru [JP/JP]; (JP) (For US Only).
SUGIMOTO, Aritoshi [JP/JP]; (JP) (For US Only).
HAMAMURA, Yuichi [JP/JP]; (JP) (For US Only).
SEKIHARA, Isamu [JP/JP]; (JP) (For US Only).
SHIMASE, Akira [JP/JP]; (JP) (For US Only)
Inventors: TOMIMATSU, Satoshi; (JP).
KOIKE, Hidemi; (JP).
AZUMA, Junzo; (JP).
ISHITANI, Tohru; (JP).
SUGIMOTO, Aritoshi; (JP).
HAMAMURA, Yuichi; (JP).
SEKIHARA, Isamu; (JP).
SHIMASE, Akira; (JP)
Agent: HIRAKI, Yusuke; Toranomon No.5 Mori Building Third Floor, 17-1, Toranomon 1-chome Minato-ku, Tokyo 105-0001 (JP)
Priority Data:
2000-222882 24.07.2000 JP
Title (EN) PROBE DRIVING METHOD, AND PROBE APPARATUS
(FR) PROCEDE ET APPAREIL DE GUIDAGE DE SONDE
Abstract: front page image
(EN)A probe driving method and a probe driving apparatus, which can bring a probe into safe and efficient contact with a sample surface by monitoring the probe height. The information of the height of the probe from the sample surface is obtained either by detecting a probe shadow (54) cast just before the contact with the sample, or from a change in the relative positions between the probe image and the sample image, as formed when obliquely irradiated with an ion beam.
(FR)L'invention concerne un procédé de guidage de sonde ainsi qu'un appareil de guidage de sonde permettant d'amener une sonde au contact d'une surface d'échantillon de manière sûre et efficace par surveillance de la hauteur de cette sonde. On obtient des informations sur la hauteur de la sonde provenant de la surface d'échantillon par détection d'une ombre de sonde (54) projetée juste avant le contact avec l'échantillon, ou à partir d'une modification de position relative entre l'image de la sonde et l'image de l'échantillon lors d'une exposition à un faisceau ionique oblique.
Designated States: CN, KR, US.
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)