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Machine translation
1. (WO2002007931) MULTI-CHAMBER CARRIER HEAD WITH A FLEXIBLE MEMBRANE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/007931    International Application No.:    PCT/US2001/014478
Publication Date: 31.01.2002 International Filing Date: 03.05.2001
Chapter 2 Demand Filed:    29.01.2002    
IPC:
B24B 41/06 (2012.01), B24B 49/16 (2006.01), H01L 21/304 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; P.O. Box 450A, Santa Clara, CA 95052 (US)
Inventors: CHEN, Hung, Chih; (US).
ZUNIGA, Steven; (US)
Agent: BERNADICOU, Michael, A.; Blakely, Sokoloff, Taylor & Zafman LLP, 7th Floor, 12400 Wilshire Boulevard, Los Angeles, CA 90025 (US)
Priority Data:
60/220,641 25.07.2000 US
09/712,389 13.11.2000 US
Title (EN) MULTI-CHAMBER CARRIER HEAD WITH A FLEXIBLE MEMBRANE
(FR) TETE DE SUPPORT A PLUSIEURS CHAMBRES POURVUE D'UNE MEMBRANE FLEXIBLE
Abstract: front page image
(EN)A carrier head (100) that has a base assembly (104) and a flexible membrane (140). The flexible membrane has a generally circular main portion (142) with a lower surface (144) that provides a substrate-mounting surface and a plurality of concentric annular portions (150, 152, 154, 156, 158) extending from the main portion and secured to the base assembly. The volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers (160, 162, 164, 166, 168). The inner annular portion (150, 152, 154, 156) may include or a notch (200), or a widened section (230), adjacentajuncture between the inner annular portions and the main portion (142).
(FR)L'invention concerne une tête de support comportant un ensemble de base et une membrane flexible. Cette membrane flexible comporte une partie principale sensiblement circulaire qui présente une surface inférieure formant une surface de montage du substrat et une pluralité de parties annulaires concentriques qui s'étendent de la partie principale et qui sont fixées à l'ensemble de base. Le volume séparant l'ensemble de base de la membrane flexible forme une pluralité de chambres pressurisables.
Designated States: JP, KR.
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR).
Publication Language: English (EN)
Filing Language: English (EN)