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1. (WO2002006377) SPIN-ON-DIELECTRIC COMPOSITIONS WITH COATING ENHANCER

Pub. No.:    WO/2002/006377    International Application No.:    PCT/US2001/022629
Publication Date: Jan 24, 2002 International Filing Date: Jul 18, 2001
IPC: C08G 61/02
Applicants: DOW GLOBAL TECHNOLOGIES INC.
Inventors: MILLS, Lynne, K.
DOMINOWSKI, JoLee, M.
ROSE, Gene, D.
STRAND, Deidre, A.
FOSTER, Kenneth, L.
HAHN, Stephen, F.
Title: SPIN-ON-DIELECTRIC COMPOSITIONS WITH COATING ENHANCER
Abstract:
This invention is a composition comprising (a) an oligomer or polymer dispersible in an organic solvent, having a low dielectric constant, or being curable to form a material having a low dielectric constant, (b) at least one organic solvent and (c) less that 1000 parts by weight of a polymeric coating additive per million parts by weight of total compsition (ppm). The polymeric additive is characterized in that it is miscible with component (a) and the solvent system but becomes incompatible with the mixture of component (a) and solvent during the coating process.