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1. (WO2002005340) CROSSLINKED RESIN AND METHOD FOR MAKING OXIDES USING SAME

Pub. No.:    WO/2002/005340    International Application No.:    PCT/FR2001/002189
Publication Date: Jan 17, 2002 International Filing Date: Jul 6, 2001
IPC: H01L 21/02
H01L 21/314
H01L 21/316
Applicants: THALES
GAUCHER, Philippe
Inventors: GAUCHER, Philippe
Title: CROSSLINKED RESIN AND METHOD FOR MAKING OXIDES USING SAME
Abstract:
The invention concerns a crosslinked resin and its use for making ceramic or glass patterns at the surface of a substrate. Said resin is obtained by mixing in a solvent one or several simple or complex metal or silicon alkoxides, acetylacetone and hexamethylene tetramine, then heating and subjecting said mixture to an exposure. The invention is applicable to ferroelectric storage units, integrated capacitors, piezoelectric transducers.