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Machine translation
1. (WO2002003138) TRANSMISSION AND PHASE BALANCE FOR PHASE-SHIFTING MASK
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2002/003138    International Application No.:    PCT/US2001/020050
Publication Date: 10.01.2002 International Filing Date: 21.06.2001
Chapter 2 Demand Filed:    18.01.2002    
IPC:
G03F 1/30 (2012.01)
Applicants: INTEL CORPORATION [US/US]; 2200 Mission College Boulevard Santa Clara, CA 95052 (US)
Inventors: QIAN, Qi-De; (US).
WILMAN, Tsai; (US)
Agent: MALLIE, Michael, J.; Blakely Sokoloff Taylor & Zafman 7th Floor 12400 Wilshire Boulevard Los Angeles, CA 90025 (US)
Priority Data:
09/607,446 30.06.2000 US
Title (EN) TRANSMISSION AND PHASE BALANCE FOR PHASE-SHIFTING MASK
(FR) EQUILIBRAGE DE TRANSMISSION ET DE PHASE, DESTINE A UN MASQUE DE DECALAGE DE PHASE
Abstract: front page image
(EN)The present invention comprises a phase-shifting mask and a process for fabricating such a phase-shifting mask. The phase-shifting mask has trenches with vertical sidewall profiles which are retrogade. The retrogade profiles balance the transmission and phase of the light transmitted through the phase-shifted openings relative to the non-phase-shifted openings. The retrograde profile may be formed from an isotropic plasma etch.
(FR)L'invention concerne un masque de décalage de phase ainsi qu'un procédé de fabrication d'un tel masque, lequel comprend des tranchées dont les profils des parois latérales verticales sont rétrogrades. Ces profils équilibrent la transmission et la phase de la lumière transmise à travers les ouvertures décalées en phase, par rapport aux ouvertures non décalées en phase. Il est possible de former ce profil rétrograde, à partir d'une gravure au plasma isotrope.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)