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1. (WO2001085308) FILTERS EMPLOYING BOTH ACIDIC POLYMERS AND PHYSICAL-ABSORPTION MEDIA

Pub. No.:    WO/2001/085308    International Application No.:    PCT/US2001/014655
Publication Date: Nov 15, 2001 International Filing Date: May 4, 2001
IPC: B01D 53/04
Applicants: EXTRACTION SYSTEMS, INC.
KISHKOVICH, Oleg, P.
KINKEAD, Devon
GRAYFER, Anatoly
GOODWIN, William, M.
RUEDE, David
Inventors: KISHKOVICH, Oleg, P.
KINKEAD, Devon
GRAYFER, Anatoly
GOODWIN, William, M.
RUEDE, David
Title: FILTERS EMPLOYING BOTH ACIDIC POLYMERS AND PHYSICAL-ABSORPTION MEDIA
Abstract:
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to absorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.