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1. (WO2001082349) THERMAL PROCESSING SYSTEM AND THERMAL PROCESSING METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2001/082349    International Application No.:    PCT/JP2001/003280
Publication Date: 01.11.2001 International Filing Date: 17.04.2001
Chapter 2 Demand Filed:    13.11.2001    
IPC:
C23C 16/48 (2006.01), H01L 21/00 (2006.01), H01L 21/687 (2006.01)
Applicants: TOKYO ELECTRON LIMITED [JP/JP]; 3-6, Akasaka 5-Chome Minato-Ku, Tokyo 107-8481 (JP) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, JP, KR, LU, MC, NL, PT, SE only).
SHIGEOKA, Takashi [JP/JP]; (JP) (For US Only).
SAKUMA, Takeshi [JP/JP]; (JP) (For US Only).
LI, Yicheng [CN/JP]; (JP) (For US Only)
Inventors: SHIGEOKA, Takashi; (JP).
SAKUMA, Takeshi; (JP).
LI, Yicheng; (JP)
Agent: ITOH, Tadahiko; 32nd Floor, Yebisu Garden Place Tower 20-3, Ebisu 4-chome Shibuya-ku, Tokyo 150-6032 (JP)
Priority Data:
2000-119325 20.04.2000 JP
2000-119998 20.04.2000 JP
Title (EN) THERMAL PROCESSING SYSTEM AND THERMAL PROCESSING METHOD
(FR) SYSTEME DE TRAITEMENT THERMIQUE ET PROCEDE DE TRAITEMENT THERMIQUE
Abstract: front page image
(EN)A thermal processing system performs predetermined thermal processing on an approximately circular to-be-processed object, by applying radiant heat to the to-be-processed object by means of a heating lamp system. The heating lamp system comprises a plurality of lamps disposed concentrically so as to correspond to the to-be-processed object.
(FR)Cette invention se rapporte à un système de traitement thermique qui effectue un traitement thermique prédéterminé sur un objet à traiter approximativement circulaire, en appliquant une chaleur rayonnante sur l'objet à traiter au moyen d'un système de lampes chauffantes. Ce système de lampes chauffantes comprend plusieurs lampes disposées selon un agencement concentrique de façon à correspondre à l'objet à traiter.
Designated States: JP, KR, US.
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE).
Publication Language: English (EN)
Filing Language: English (EN)