Feedback
Settings

Settings

Goto Application

1. WO2001046708 - SENSOR DEVICE AND METHOD OF MANUFACTURE THEREOF

PermaLink
Publication Number WO/2001/046708
Publication Date 28.06.2001
International Application No. PCT/JP1999/007230
International Filing Date 22.12.1999
IPC
B81C 1/00 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
G01F 1/684 2006.1
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW, OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
G01L 9/00 2006.1
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01N 27/12 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02by investigating impedance
04by investigating resistance
12of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid
G01P 5/12 2006.1
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
5Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
10by measuring thermal variables
12using variation of resistance of a heated conductor
G01P 15/08 2006.1
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
CPC
B81C 1/00896
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
00865Multistep processes for the separation of wafers into individual elements
00896Temporary protection during separation into individual elements
G01F 1/6845
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
6845Micromachined devices
G01L 9/0042
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
G01N 27/121
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
02by investigating impedance
04by investigating resistance
12of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid ; , for detecting components in the fluid
121for determining moisture content, e.g. humidity, of the fluid
G01P 15/0802
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0802Details
G01P 15/125
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
125by capacitive pick-up
Applicants
  • MITSUBICHI DENKI KABUSHIKI KAISHA [JP]/[JP] (AllExceptUS)
  • YASUDA, Naoki [JP]/[JP] (UsOnly)
  • FUKAMI, Tatsuya [JP]/[JP] (UsOnly)
  • TAGUCHI, Motohisa [JP]/[JP] (UsOnly)
  • KAWANO, Yuji [JP]/[JP] (UsOnly)
Inventors
  • YASUDA, Naoki
  • FUKAMI, Tatsuya
  • TAGUCHI, Motohisa
  • KAWANO, Yuji
Agents
  • MIYATA, Kaneo
Priority Data
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) SENSOR DEVICE AND METHOD OF MANUFACTURE THEREOF
(FR) EQUIPEMENT DE DETECTION ET SON PROCEDE DE FABRICATION
front page image
Abstract
(EN) A sensor device comprises a sensor substrate and a flat, silicone-coated sensor element held on the sensor substrate. The silicone coating provides good step coverage for the sensor element so that the stress on the sensor element can decrease. The coating can be formed at low temperature so that the effects on the sensor element are reduced in the manufacturing process.
(FR) L'invention concerne un équipement de détection comprenant un substrat de et un élément revêtu de silicone, plat placé sur le substrat. Le revêtement en silicone fournit une bonne couverture des créneaux à l'élément de manière que la contrainte sur cet élément puisse être réduite. Le revêtement est fabriqué à basse température afin de réduire les effets sur l'élément dans le processus de fabrication.
Related patent documents
EP1180693
JPWO2001046708
KR1020020002473
US6703132
Latest bibliographic data on file with the International Bureau
# -