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1. (WO2001039337) DEEP ULTRAVIOLET CATADIOPTRIC ANAMORPHIC TELESCOPE
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2001/039337 International Application No.: PCT/US2000/031323
Publication Date: 31.05.2001 International Filing Date: 15.11.2000
Chapter 2 Demand Filed: 13.06.2001
IPC:
G02B 17/08 (2006.01) ,G03F 7/20 (2006.01) ,H01S 3/00 (2006.01)
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
17
Systems with reflecting surfaces, with or without refracting elements
08
Catadioptric systems
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
Applicants:
SMITH, Scott, T. [US/US]; US (UsOnly)
CYMER, INC. [US/US]; 16750 Via Del Campo Court San Diego, CA 92127-1712, US (AllExceptUS)
Inventors:
SMITH, Scott, T.; US
Agent:
ROSS, John, R.; Cymer, Inc. Legal Department - MS/1-2A 16750 Via Del Campo Court San Diego, CA 92127-1712, US
Priority Data:
09/450,91929.11.1999US
Title (EN) DEEP ULTRAVIOLET CATADIOPTRIC ANAMORPHIC TELESCOPE
(FR) TELESCOPE ANAMORPHIQUE CATADIOPTRIQUE A ULTRAVIOLET PROFOND
Abstract:
(EN) A catadioptric anamorphic beam expanding telescope (2A, 2B) expands a beam in a first axis substantially perpendicular to the beam propagation axis, and deflects it in a plane substantially perpendicular to the first axis. The beam expanding telescope (2A, 2B) can include reflective, refractive, and combined reflective/refractive elements. An embodiment includes an off axis convex spheric reflector (205) and off axis combined reflective/refractive optical element, commonly known as a Mangin mirror (206), incorporating a refractive first surface and a reflective rear surface, which compensate for aberrations introduced by the off axis deflection of the beam. The telescope is particularly useful for deep ultraviolet (DUV) applications at wavelengths shorter than about 250 nm.
(FR) L"invention concerne un télescope (2A, 2B) dilatateur de faisceau anamorphique catadioptrique qui dilate un faisceau dans un premier axe sensiblement perpendiculaire à l"axe de propagation du faisceau, et le défléchit dans un plan sensiblement perpendiculaire au premier axe. Le télescope (2A, 2B) dilatateur de faisceau peut comprendre des éléments réflecteurs, réfracteurs et des éléments combinés réflecteurs/réfracteurs. Une forme de réalisation comprend un réflecteur (205) sphérique convexe hors-axe et un élément optique combiné réflecteur/réfracteur hors-axe, communément appelé miroir de Mangin (206), incorporant une première surface réfractrice et une surface arrière réflectrice, qui compense les aberrations introduites par la déflexion hors-axe du faisceau. Le télescope est particulièrement utile pour des applications à ultraviolet profond (DUV) à des longueurs d"onde inférieures à environ 250 nm.
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CR, CU, CZ, DE, DK, DM, DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZW
African Regional Intellectual Property Organization (ARIPO) (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)