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1. (WO2001036929) VIA INSPECTION WITH AN OPTICAL INSPECTION SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2001/036929 International Application No.: PCT/US2000/041911
Publication Date: 25.05.2001 International Filing Date: 06.11.2000
Chapter 2 Demand Filed: 05.06.2001
IPC:
G01N 21/88 (2006.01) ,G01N 21/956 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
Applicants: FRAME, Gary, E.[US/US]; US (UsOnly)
MIDAS VISION SYSEMS, INC.[US/US]; 25 Commercial Drive Wrentham, MA 02093, US (AllExceptUS)
Inventors: FRAME, Gary, E.; US
Agent: MALONEY, Denis, G.; Fish & Richardson P.C. 225 Franklin Street Boston, MA 02110-2804, US
Priority Data:
09/434,88505.11.1999US
Title (EN) VIA INSPECTION WITH AN OPTICAL INSPECTION SYSTEM
(FR) CONTROLE DE TROUS DE LIAISON DANS UN SYSTEME DE CONTROLE OPTIQUE
Abstract:
(EN) An optical inspection apparatus includes a platform (14) for holding a device under inspection (32) and a light source (16) disposed to illuminate a backside portion of the device. The inspection apparatus also includes a camera (12) disposed over a front side portion of the device to receive optical energy that penetrates through the device and a diffuser (36) disposed over a front side portion of the device. The illumination source provides an image on a bottom surface of the diffuser, for processing by the camera.
(FR) L'invention concerne un appareil de contrôle optique. Cet appareil comprend un plateau pour supporter un dispositif contrôlé et une source de lumière est prévue pour éclairer une partie arrière du dispositif. Cet appareil de contrôle comprend également une caméra placée sur une partie latérale avant du dispositif pour recevoir l'énergie optique qui pénètre par le dispositif et un diffuseur également placé sur une partie latérale avant du dispositif. La source d'éclairage fournit une image sur une surface de fond du diffuseur en vue de son traitement par la caméra.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CR, CU, CZ, DE, DK, DM, DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZW
African Regional Intellectual Property Organization (ARIPO) (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)