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Machine translation
1. (WO2001036578) NON-CORROSIVE CLEANING COMPOSITION FOR REMOVING PLASMA ETCHING RESIDUES
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2001/036578 International Application No.: PCT/US2000/041301
Publication Date: 25.05.2001 International Filing Date: 20.10.2000
Chapter 2 Demand Filed: 08.05.2001
IPC:
C11D 7/10 (2006.01) ,C11D 7/26 (2006.01) ,C11D 11/00 (2006.01)
Applicants: ARCH SPECIALTY CHEMICALS, INC.[US/US]; 501 Merritt 7 Norwalk, CT 06856, US
Inventors: HONDA, Kenji; KR
ELDERKIN, Michelle; US
LEON, Vincent; US
Agent: GREELEY, Paul, D.; Ohlandt, Greeley, Ruggiero & Perle, L.L.P. 9th floor One Landmark Square Stamford, CT 06901-2682, US
Priority Data:
09/439,46915.11.1999US
Title (EN) NON-CORROSIVE CLEANING COMPOSITION FOR REMOVING PLASMA ETCHING RESIDUES
(FR) COMPOSITION DE NETTOYAGE NON CORROSIVE DESTINEE A ELIMINER LES RESIDUS DE GRAVURE AU PLASMA
Abstract:
(EN) A non-corrosive cleaning composition for removing residues from a substrate. The composition comprises: (a) water; (b) at least one hydroxylammonium compound; (c) at least one basic compound, preferably selected from the group consisting of amines and quaternary ammonium hydroxides; (d) at least one organic carboxylic acid; and (e) optionally, a polyhydric compound. The pH of the composition is preferably between about 2 to about 6.
(FR) Composition de nettoyage non corrosive destinée à éliminer les résidus d'un substrat. La composition contient: (a) de l'eau; (b) au moins un composé d'hydroxylammonium; (c) au moins un composé basique, de préférence choisi dans le groupe contenant des amines ainsi que des hydroxydes d'ammonium quaternaires; (d) au moins un acide carboxylique organique; et (e) facultativement, un composé polyhydrique. Le pH de la composition est compris de préférence entre environ 2 et environ 6.
Designated States: JP, KR, SG
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: English (EN)
Filing Language: English (EN)