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1. (WO2001035459) CERAMIC SUBSTRATE

Pub. No.:    WO/2001/035459    International Application No.:    PCT/JP2000/000817
Publication Date: Fri May 18 01:59:59 CEST 2001 International Filing Date: Wed Feb 16 00:59:59 CET 2000
IPC: H01L 21/683
H01L 23/498
H02N 13/00
Applicants: IBIDEN CO., LTD.

ITO, Yasutaka

Inventors: ITO, Yasutaka

Title: CERAMIC SUBSTRATE
Abstract:
A ceramic substrate, a wafer prober, ceramic heater, and an electrostatic chuck, for use in semiconductor producing and inspecting devices, having a through-hole construction superior in resistance to pull-out force acting on an outside terminal pin. A through-hole (14) formed in a ceramic substrate (12) made mainly of aluminum nitride is formed with projections (16) projecting into the ceramic substrate (12).