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1. (WO2001033164) MEASUREMENT OF OBJECTS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2001/033164 International Application No.: PCT/GB2000/004226
Publication Date: 10.05.2001 International Filing Date: 03.11.2000
Chapter 2 Demand Filed: 06.04.2001
IPC:
G01B 11/24 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
Applicants:
BURTON, David, Robert [GB/GB]; GB
LALOR, Michael, Joseph [GB/GB]; GB
MOORE, Christopher, John [GB/GB]; GB
Inventors:
BURTON, David, Robert; GB
LALOR, Michael, Joseph; GB
MOORE, Christopher, John; GB
Agent:
W.P. THOMPSON & CO.; Coopers Building Church Street Liverpool L1 3AB, GB
Priority Data:
9926014.304.11.1999GB
Title (EN) MEASUREMENT OF OBJECTS
(FR) MESURE D'OBJETS
Abstract:
(EN) There is disclosed a method for measuring an object comprising: 1. projecting an interference fringe pattern onto the object using sources of e.m. radiation; 2. measuring the phase shift and image intensity of the fringe pattern across an image field; 3. measuring the intensity of background illumination across the image field; 4. modifying the measurements of the fringe pattern by subtracting an amount corresponding to the measured background illumination across the image field; and 5. generating a 3-D height map of the object using the modified measurements.
(FR) La présente invention concerne un procédé permettant de mesurer un objet, qui consiste : 1. à projeter un motif de franges d'interférences sur l'objet à l'aide de sources de rayonnement électromagnétique ; 2. à mesurer le décalage de phase et l'intensité d'image du motif de franges sur un champ d'image ; 3. à mesurer l'intensité de l'éclairage de fond sur le champ de l'image ; 4. à modifier les mesures du motif de franges en soustrayant une quantité correspondant à l'éclairage de fond mesuré sur le champ de l'image ; et 5. à produire une carte en hauteur en trois dimensions de l'objet sur la base des mesures modifiées.
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CR, CU, CZ, DE, DK, DM, DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZW
African Regional Intellectual Property Organization (ARIPO) (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)